Inventor · disambiguated record
Kaori Shirahata
Also filed as: SHIRAHATA KAORI
5 granted patents·5 citations·filing 2010–2018
65Inventor score
Top patents by PatentIndex Score
5 records- 0177US9520266B2Pattern critical dimension measurement equipment and method for measuring pattern critical dimensionHITACHI HIGH TECH CORP·Filed 2014·Granted Dec 13, 2016·4 cites·20 claims
- 0261US8637820B2Scanning electron microscope and inspection method using sameSOHDA YASUNARI·Filed 2011·Granted Jan 28, 2014·1 cites·19 claims
- 0351US10361063B2Charged particle detector and charged particle beam device using the sameHITACHI LTD·Filed 2018·Granted Jul 23, 2019·0 cites·14 claims
- 0435US10014160B2Scanning electron microscope and method for controlling sameHITACHI HIGH TECH CORP·Filed 2015·Granted Jul 3, 2018·0 cites·20 claims
- 0532US8478021B2Charged beam deviceSHIRAHATA KAORI·Filed 2010·Granted Jul 2, 2013·0 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →