Inventor · disambiguated record
David Setton
Also filed as: SETTON DAVID · SETTON DAVID A · SETTON DAVID ACHER
6 granted patents·9 pending applications·875 citations·filing 1998–2024
87Inventor score
Top patents by PatentIndex Score
15 records- 0197US6315512B1Systems and methods for robotic transfer of workpieces between a storage area and a processing chamberMATTSON TECH INC·Filed 1998·Granted Nov 13, 2001·737 cites·32 claims
- 0292US6647665B1Door systems for low contamination, high throughput handling of workpieces for vacuum processingMATTSON TECH INC·Filed 2000·Granted Nov 18, 2003·58 cites·18 claims
- 0390US6568552B1Systems and methods for low contamination, high throughput handling of workpieces for vacuum processingMATTSON TECH INC·Filed 2000·Granted May 27, 2003·45 cites·6 claims
- 0484US10923322B2Articulated direct-mount inductor and associated systems and methodsLAM RES CORP·Filed 2017·Granted Feb 16, 2021·3 cites·16 claims
- 0579US6837026B2Pre-filled personal hydration reservoirSETTON DAVID·Filed 2002·Granted Jan 4, 2005·30 cites·7 claims
- 0672US2025054738A1Tunable esc for rapid alternating process applicationsLAM RES CORP·Filed 2024·Application pending·0 cites
- 0767US9437400B2Insulated dielectric window assembly of an inductively coupled plasma processing apparatusSETTON DAVID·Filed 2012·Granted Sep 6, 2016·2 cites·24 claims
- 0855US2005268572A1Pre-filled personal hydration reservoirSETTON DAVID·Filed 2004·Application pending·0 cites
- 0954US2025349511A1Window Edge Heater for High Power Plasma Processing ApplicationsLAM RES CORP·Filed 2023·Application pending·0 cites
- 1047US2019214236A1Tunable esc for rapid alternating process applicationsLAM RES CORP·Filed 2018·Application pending·0 cites
- 1146US2023395359A1Cold edge low temperature electrostatic chuckLAM RES CORP·Filed 2021·Application pending·0 cites
- 1245US2023298929A1Thin shadow ring for low-tilt trench etchingLAM RES CORP·Filed 2021·Application pending·0 cites
- 1344US2008213978A1Debris management for wafer singulationDYNATEX·Filed 2007·Application pending·0 cites
- 1442US2004091349A1Methods for transporting wafers for vacuum processingFiled 2003·Application pending·0 cites
- 1537US2018047543A1Systems and methods for rf power ratio switching for iterative transitioning between etch and deposition processesLAM RES CORP·Filed 2017·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →