Inventor · disambiguated record
Farid Askary
Also filed as: ASKARY FARID
4 granted patents·179 citations·filing 1986–2001
82Inventor score
Top patents by PatentIndex Score
4 records- 0192US5869833AElectron beam dose control for scanning electron microscopy and critical dimension measurement instrumentsKLA TENCOR CORP·Filed 1997·Granted Feb 9, 1999·78 cites·18 claims
- 0282US6873747B2Method for measurement of pitch in metrology and imaging systemsFiled 2001·Granted Mar 29, 2005·43 cites·22 claims
- 0381US4774416ALarge cross-sectional area molecular beam source for semiconductor processingPLASER CORP·Filed 1986·Granted Sep 27, 1988·33 cites·36 claims
- 0476US6211518B1Electron beam dose control for scanning electron microscopy and critical dimension measurement instrumentsKLA TENCOR CORP·Filed 1998·Granted Apr 3, 2001·25 cites·21 claims
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