Inventor · disambiguated record
Yorkman Ma
Also filed as: MA YORKMAN
2 granted patents·3 pending applications·48 citations·filing 2001–2023
57Inventor score
Technology areasH10P
Top patents by PatentIndex Score
5 records- 0184US6770146B2Method and system for rotating a semiconductor wafer in processing chambersMATTSON TECH INC·Filed 2001·Granted Aug 3, 2004·48 cites·38 claims
- 0266US2023411125A1Temperature Control Using Temperature Control Element Coupled to Faraday ShieldBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2023·Application pending·0 cites
- 0348US11749509B2Temperature control using temperature control element coupled to faraday shieldMATTSON TECH INC·Filed 2018·Granted Sep 5, 2023·0 cites·10 claims
- 0440US2015163860A1Apparatus and method for uniform irradiation using secondary irradiant energy from a single light sourceLAM RES CORP·Filed 2013·Application pending·0 cites
- 0539US2020258718A1Gas Supply With Angled Injectors In Plasma Processing ApparatusMATTSON TECH INC·Filed 2019·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →