Inventor · disambiguated record
Stefan Sawusch
Also filed as: SAWUSCH STEFAN
2 granted patents·1 pending application·5 citations·filing 2006–2011
44Inventor score
Top patents by PatentIndex Score
3 records- 0171US7732340B2Method for adjusting a critical dimension in a high aspect ratio featureTOKYO ELECTRON LTD·Filed 2006·Granted Jun 8, 2010·5 cites·16 claims
- 0241US2009178714A1Flow control system and method for multizone gas distributionTOKYO ELECTRON LTD·Filed 2008·Application pending·0 cites
- 0330US8464741B2Flow control method for multizone gas distributionSAWUSCH STEFAN·Filed 2011·Granted Jun 18, 2013·0 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →