Inventor · disambiguated record
Fa-Yuan Chang
Also filed as: CHANG FA-YUAN
5 granted patents·2 pending applications·82 citations·filing 1997–2007
78Inventor score
Top patents by PatentIndex Score
7 records- 0177US6069091AIn-situ sequential silicon containing hard mask layer/silicon layer plasma etch methodTAIWAN SEMICONDUCTOR MFG·Filed 1997·Granted May 30, 2000·65 cites·8 claims
- 0275US7732299B2Process for wafer bondingTAIWAN SEMICONDUCTOR MFG·Filed 2007·Granted Jun 8, 2010·6 cites·20 claims
- 0353US7696766B2Ultra-fine pitch probe card structureTAIWAN SEMICONDUCTOR MFG·Filed 2007·Granted Apr 13, 2010·2 cites·28 claims
- 0452US6679064B2Wafer transfer system with temperature control apparatusTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Jan 20, 2004·7 cites·19 claims
- 0546US8084361B2Semiconductor fabrication method suitable for MEMSHUANG TSUNG-CHENG·Filed 2007·Granted Dec 27, 2011·2 cites·20 claims
- 0639US2006189023A1Three dimensional structure formed by using an adhesive silicon wafer processTAIWAN SEMICONDUCTOR MFG·Filed 2005·Application pending·0 cites
- 0735US2005029221A1Deep trench etching using HDP chamberTAIWAN SEMICONDUCTOR MFG·Filed 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →