Inventor · disambiguated record
Toru Hayasaka
Also filed as: HAYASAKA TORU
4 granted patents·3 pending applications·17 citations·filing 2020–2025
75Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD7
Top patents by PatentIndex Score
7 records- 0198US11476089B2Control method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Oct 18, 2022·7 cites·27 claims
- 0297US12165842B2Control method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2023·Granted Dec 10, 2024·2 cites·26 claims
- 0397US11742182B2Control method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2022·Granted Aug 29, 2023·3 cites·54 claims
- 0497US11742181B2Control method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Aug 29, 2023·5 cites·33 claims
- 0590US2025062101A1Control method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0689US2025308844A1Control method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0789US2025308843A1Control method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →