Inventor · disambiguated record
Ichiro Nunomura
Also filed as: NUNOMURA ICHIRO
3 granted patents·3 pending applications·0 citations·filing 2010–2023
38Inventor score
Top patents by PatentIndex Score
6 records- 0148US2023326771A1Substrate processing apparatus, apparatus start-up method, method of manufacturing semiconductor device, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2023·Application pending·0 cites
- 0244US10452856B2Processing apparatus, controller and processing systemHITACHI INT ELECTRIC INC·Filed 2017·Granted Oct 22, 2019·0 cites·15 claims
- 0343US2023187243A1Substrate processing apparatus, method of manufacturing semiconductor device, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2022·Application pending·0 cites
- 0434US11521880B2Substrate processing apparatus and recording medium for changing atmosphere of transfer chamberKOKUSAI ELECTRIC CORP·Filed 2019·Granted Dec 6, 2022·0 cites·13 claims
- 0534US2013247937A1Substrate processing apparatus and its maintenance method, substrate transfer method and programHITACHI INT ELECTRIC INC·Filed 2013·Application pending·0 cites
- 0631US8457774B2Substrate processing apparatus, control method of the substrate processing apparatus, manufacturing method of semiconductor device and apparatus state shifting methodOZAKI YUKIO·Filed 2010·Granted Jun 4, 2013·0 cites·3 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →