Inventor · disambiguated record
Ian Kenworthy
Also filed as: KENWORTHY IAN · KENWORTHY IAN J · KENWORTHY IAN JARED
17 granted patents·1 pending application·131 citations·filing 2007–2019
93Inventor score
Top patents by PatentIndex Score
18 records- 0196US9099398B2Gas distribution showerhead for inductively coupled plasma etch reactorLAM RES CORP·Filed 2013·Granted Aug 4, 2015·41 cites·15 claims
- 0294US8562785B2Gas distribution showerhead for inductively coupled plasma etch reactorKANG MICHAEL·Filed 2011·Granted Oct 22, 2013·20 cites·15 claims
- 0387US10049862B2Chamber with vertical support stem for symmetric conductance and RF deliveryLAM RES CORP·Filed 2016·Granted Aug 14, 2018·4 cites·25 claims
- 0487US9934979B2Gas distribution showerhead for inductively coupled plasma etch reactorLAM RES CORP·Filed 2015·Granted Apr 3, 2018·4 cites·28 claims
- 0585US8852685B2Coating method for gas delivery systemKENWORTHY IAN·Filed 2010·Granted Oct 7, 2014·11 cites·11 claims
- 0685US8469368B2Edge rings for electrostatic chucksKENWORTHY IAN JARED·Filed 2009·Granted Jun 25, 2013·16 cites·30 claims
- 0785US8128750B2Aluminum-plated components of semiconductor material processing apparatuses and methods of manufacturing the componentsKENWORTHY IAN J·Filed 2007·Granted Mar 6, 2012·12 cites·16 claims
- 0884US9076634B2Replaceable upper chamber parts of plasma processing apparatusBROWN DANIEL ARTHUR·Filed 2010·Granted Jul 7, 2015·9 cites·20 claims
- 0981US9058960B2Compression member for use in showerhead electrode assemblyEHRLICH DARRELL·Filed 2012·Granted Jun 16, 2015·6 cites·16 claims
- 1077US10665435B2Chamber with vertical support stem for symmetric conductance and RF deliveryLAM RES CORP·Filed 2019·Granted May 26, 2020·1 cites·20 claims
- 1176US10985078B2Sensor and adjuster for a consumableLAM RES CORP·Filed 2015·Granted Apr 20, 2021·2 cites·7 claims
- 1275US10395902B2Chamber with vertical support stem for symmetric conductance and RF deliveryLAM RES CORP·Filed 2018·Granted Aug 27, 2019·1 cites·27 claims
- 1374US8282987B2Aluminum-plated components of semiconductor material and methods of manufacturing the componentsKENWORTHY IAN J·Filed 2012·Granted Oct 9, 2012·3 cites·5 claims
- 1468US9922804B2Compression member for use in showerhead electrode assemblyLAM RES CORP·Filed 2015·Granted Mar 20, 2018·1 cites·18 claims
- 1559US10332729B2Compression member for use in showerhead electrode assemblyLAM RES CORP·Filed 2018·Granted Jun 25, 2019·0 cites·18 claims
- 1654US9689533B2Coating method for gas delivery systemLAM RES CORP·Filed 2014·Granted Jun 27, 2017·0 cites·20 claims
- 1753US10074521B2Replaceable upper chamber parts of plasma processing apparatusLAM RES CORP·Filed 2015·Granted Sep 11, 2018·0 cites·20 claims
- 1834US2013264309A1Acoustic energy utilization in plasma processingKENWORTHY IAN J·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →