Inventor · disambiguated record
Petrus Matthijs Henricus Vosters
Also filed as: VOSTERS PETRUS M H · VOSTERS PETRUS MATTHIJS HENRIC · VOSTERS PETRUS MATTHIJS HENRICUS
18 granted patents·92 citations·filing 2002–2009
93Inventor score
Top patents by PatentIndex Score
18 records- 0190US7292317B2Lithographic apparatus and device manufacturing method utilizing substrate stage compensatingASML NETHERLANDS BV·Filed 2005·Granted Nov 6, 2007·13 cites·11 claims
- 0287US7417711B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Aug 26, 2008·8 cites·11 claims
- 0385US6906786B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Jun 14, 2005·23 cites·27 claims
- 0484US7538857B2Lithographic apparatus and device manufacturing method utilizing a substrate handlerASML NETHERLANDS BV·Filed 2005·Granted May 26, 2009·7 cites·16 claims
- 0572US7012264B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Mar 14, 2006·9 cites·22 claims
- 0670US7656506B2Lithographic apparatus and device manufacturing method utilizing a substrate handlerASML NETHERLANDS BV·Filed 2005·Granted Feb 2, 2010·2 cites·16 claims
- 0770US7456935B2Lithographic apparatus and device manufacturing method utilizing a positioning device for positioning an object tableASML NETHERLANDS BV·Filed 2005·Granted Nov 25, 2008·3 cites·20 claims
- 0868US7576835B2Substrate handler, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Aug 18, 2009·2 cites·19 claims
- 0967US7239369B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Jul 3, 2007·7 cites·21 claims
- 1061US7064808B1Substrate carrier and method for making a substrate carrierASML NETHERLANDS BV·Filed 2004·Granted Jun 20, 2006·10 cites·24 claims
- 1159US7072025B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Jul 4, 2006·1 cites·24 claims
- 1257US8411252B2Lithographic apparatus and device manufacturing method utilizing a substrate handlerJACOBS HERNES·Filed 2009·Granted Apr 2, 2013·0 cites·5 claims
- 1355US6815699B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2002·Granted Nov 9, 2004·5 cites·18 claims
- 1451US7230254B2Movable carriage for a lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Jun 12, 2007·0 cites·19 claims
- 1550US8174680B2Substrate handler, lithographic apparatus and device manufacturing methodVAN DER SCHOOT HARMEN KLAAS·Filed 2009·Granted May 8, 2012·0 cites·21 claims
- 1647US6995379B2Lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2003·Granted Feb 7, 2006·2 cites·19 claims
- 1741US7256867B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Aug 14, 2007·0 cites·56 claims
- 1834US6970230B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Nov 29, 2005·0 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →