Inventor · disambiguated record
Martinus Cornelis Maria Verhagen
Also filed as: VERHAGEN MARTINUS CORNELIS MAR · VERHAGEN MARTINUS CORNELIS MARIA
47 granted patents·3 pending applications·348 citations·filing 2004–2021
98Inventor score
Files withASML NETHERLANDS BV34VERHAGEN MARTINUS CORNELIS MARIA4DIERICHS MARCEL MATHIJS THEODORE MARIE3CADEE THEODORUS PETRUS MARIA2KEMPER NICOLAAS RUDOLF2
Top patents by PatentIndex Score
50 records- 0198US7733459B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Jun 8, 2010·66 cites·50 claims
- 0297US8031325B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2010·Granted Oct 4, 2011·13 cites·20 claims
- 0396US7804575B2Lithographic apparatus and device manufacturing method having liquid evaporation controlASML NETHERLANDS BV·Filed 2005·Granted Sep 28, 2010·23 cites·44 claims
- 0496US7701550B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Apr 20, 2010·45 cites·42 claims
- 0596US7602470B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Oct 13, 2009·20 cites·21 claims
- 0695US8629971B2Lithographic apparatus and device manufacturing methodDIERICHS MARCEL MATHIJS THEODORE MARIE·Filed 2010·Granted Jan 14, 2014·9 cites·20 claims
- 0794US11378893B2Lithographic apparatus and device manufacturing method involving a heaterASML NETHERLANDS BV·Filed 2020·Granted Jul 5, 2022·2 cites·20 claims
- 0893US9581914B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Feb 28, 2017·5 cites·21 claims
- 0993US9488923B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Nov 8, 2016·4 cites·20 claims
- 1093US9025127B2Lithographic apparatus and device manufacturing methodDIERICHS MARCEL MATHIJS THEODORE MARIE·Filed 2011·Granted May 5, 2015·6 cites·22 claims
- 1193US8953144B2Lithographic apparatus and device manufacturing methodDIERICHS MARCEL MATHIJS THEODORE MARIE·Filed 2011·Granted Feb 10, 2015·6 cites·22 claims
- 1292US7751027B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Jul 6, 2010·18 cites·65 claims
- 1391US8934082B2Lithographic apparatus and device manufacturing methodMERTENS JEROEN JOHANNES SOPHIA MARIA·Filed 2011·Granted Jan 13, 2015·5 cites·20 claims
- 1490US9436097B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Sep 6, 2016·3 cites·20 claims
- 1590US8446563B2Lithographic apparatus and device manufacturing methodKEMPER NICOLAAS RUDOLF·Filed 2009·Granted May 21, 2013·6 cites·24 claims
- 1690US7379155B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted May 27, 2008·28 cites·26 claims
- 1789US9188880B2Lithographic apparatus and device manufacturing method involving a heaterCADEE THEODORUS PETRUS MARIA·Filed 2011·Granted Nov 17, 2015·4 cites·32 claims
- 1888US9268242B2Lithographic apparatus and device manufacturing method involving a heater and a temperature sensorCADEE THEODORUS PETRUS MARIA·Filed 2010·Granted Feb 23, 2016·4 cites·38 claims
- 1988US7397533B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Jul 8, 2008·23 cites·32 claims
- 2087US9268236B2Lithographic apparatus and device manufacturing method having heat pipe with fluid to cool substrate and/or substrate holderJACOBS JOHANNES HENRICUS WILHELMUS·Filed 2010·Granted Feb 23, 2016·5 cites·27 claims
- 2187US7428038B2Lithographic apparatus, device manufacturing method and apparatus for de-gassing a liquidASML NETHERLANDS BV·Filed 2005·Granted Sep 23, 2008·8 cites·20 claims
- 2286US10838310B2Lithographic apparatus and device manufacturing method involving a heaterASML NETHERLANDS BV·Filed 2019·Granted Nov 17, 2020·1 cites·20 claims
- 2385US8610089B2Thermal conditioning system for thermal conditioning a part of a lithographic apparatus and a thermal conditioning methodDONDERS SJOERD NICOLAAS LAMBERTUS·Filed 2012·Granted Dec 17, 2013·13 cites·19 claims
- 2484US10248033B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Apr 2, 2019·1 cites·20 claims
- 2584US8018573B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Sep 13, 2011·6 cites·19 claims
- 2681US9753380B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Sep 5, 2017·1 cites·20 claims
- 2779US7378025B2Fluid filtration method, fluid filtered thereby, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted May 27, 2008·6 cites·18 claims
- 2877US10599054B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Mar 24, 2020·0 cites·20 claims
- 2976US9411238B2Source-collector device, lithographic apparatus, and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted Aug 9, 2016·4 cites·8 claims
- 3076US8004652B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2008·Granted Aug 23, 2011·2 cites·26 claims
- 3174US8107053B2Lithographic apparatus, device manufacturing method and apparatus for de-gassing a liquidVERHAGEN MARTINUS CORNELIS MARIA·Filed 2008·Granted Jan 31, 2012·3 cites·20 claims
- 3272US10705439B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Jul 7, 2020·0 cites·20 claims
- 3371US10331047B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Jun 25, 2019·0 cites·20 claims
- 3469US9904185B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Feb 27, 2018·0 cites·20 claims
- 3568US8246838B2Fluid filtration method, fluid filtered thereby, lithographic apparatus and device manufacturing methodVERHAGEN MARTINUS CORNELIS MARIA·Filed 2011·Granted Aug 21, 2012·1 cites·6 claims
- 3668US7271873B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Sep 18, 2007·3 cites·28 claims
- 3768US2017139333A1Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Application pending·0 cites
- 3866US9507278B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Nov 29, 2016·0 cites·20 claims
- 3965US9746788B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Aug 29, 2017·0 cites·20 claims
- 4063US10254663B2Lithographic apparatus and device manufacturing method involving a heaterASML NETHERLANDS BV·Filed 2015·Granted Apr 9, 2019·0 cites·38 claims
- 4163US8755028B2Lithographic apparatus and device manufacturing methodKEMPER NICOLAAS RUDOLF·Filed 2011·Granted Jun 17, 2014·0 cites·23 claims
- 4258US8045137B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2008·Granted Oct 25, 2011·0 cites·14 claims
- 4353US8958051B2Lithographic apparatus, device manufacturing method and apparatus for de-gassing a liquidVERHAGEN MARTINUS CORNELIS MARIA·Filed 2011·Granted Feb 17, 2015·0 cites·19 claims
- 4453US8902404B2Lithographic apparatus and device manufacturing methodSTAVENGA MARCO KOERT·Filed 2011·Granted Dec 2, 2014·0 cites·20 claims
- 4553US2023400785A1Conditioning apparatus and methodASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 4652US2012008115A1Lithographic apparatus and device manufacturing methodVERHAGEN MARTINUS CORNELIS MARIA·Filed 2011·Application pending·0 cites
- 4748US7072021B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Jul 4, 2006·3 cites·11 claims
- 4846US7914687B2Fluid filtration method, fluid filtered thereby, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2008·Granted Mar 29, 2011·1 cites·21 claims
- 4940US8508711B2Lithographic apparatus and device manufacturing methodMARTENS ARJAN HUBRECHT JOSEF ANNA·Filed 2009·Granted Aug 13, 2013·0 cites·25 claims
- 5040US7378669B2Lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2004·Granted May 27, 2008·0 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →