Inventor · disambiguated record
Lih-Huah Yiin
Also filed as: YIIN LIH-HUAH
9 granted patents·135 citations·filing 2002–2014
88Inventor score
Top patents by PatentIndex Score
9 records- 0196US7873204B2Method for detecting lithographically significant defects on reticlesKLA TENCOR CORP·Filed 2007·Granted Jan 18, 2011·56 cites·20 claims
- 0291US7126681B1Closed region defect detection systemKLA TENCOR TECH CORP·Filed 2003·Granted Oct 24, 2006·43 cites·14 claims
- 0377US7499156B2Closed region defect detection systemKLA TENCOR TECH CORP·Filed 2006·Granted Mar 3, 2009·4 cites·19 claims
- 0469US8855400B2Detection of thin lines for selective sensitivity during reticle inspection using processed imagesWANG ZHENGYU·Filed 2012·Granted Oct 7, 2014·3 cites·21 claims
- 0569US7027635B1Multiple design database layer inspectionKLA TENCOR TECH CORP·Filed 2002·Granted Apr 11, 2006·11 cites·39 claims
- 0668US8090189B1Detection of thin line for selective sensitivity during reticle inspectionPHALKE VINAYAK DATTATREYA·Filed 2008·Granted Jan 3, 2012·8 cites·18 claims
- 0768US7167185B1Visualization of photomask databasesKLA TENCOR TECH CORP·Filed 2003·Granted Jan 23, 2007·9 cites·9 claims
- 0866US9733640B2Method and apparatus for database-assisted requalification reticle inspectionKLA TENCOR CORP·Filed 2012·Granted Aug 15, 2017·1 cites·25 claims
- 0960US9092847B2Detection of thin lines for selective sensitivity during reticle inspection using processed imagesKLA TENCOR CORP·Filed 2014·Granted Jul 28, 2015·0 cites·18 claims
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