Inventor · disambiguated record
Kuno Backhaus
Also filed as: BACKHAUS KUNO
3 granted patents·62 citations·filing 2000–2002
69Inventor score
Top patents by PatentIndex Score
3 records- 0187US6456373B1Method and apparatus for monitoring the light emitted from an illumination apparatus for an optical measuring instrumentLEICA MICROSYSTEMS·Filed 2000·Granted Sep 24, 2002·54 cites·19 claims
- 0253US6618154B2Optical measurement arrangement, in particular for layer thickness measurementLEICA MICROSYSTEMS·Filed 2001·Granted Sep 9, 2003·7 cites·10 claims
- 0352US7084965B2Arrangement and method for inspecting unpatterned wafersVISTEC SEMICONDUCTOR SYSTEMS J·Filed 2002·Granted Aug 1, 2006·1 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →