Inventor · disambiguated record
Aleksandr Khmelichek
Also filed as: KHMELICHEK ALEKSANDR
6 granted patents·1 pending application·30 citations·filing 2004–2006
81Inventor score
Technology areasG03F
Top patents by PatentIndex Score
7 records- 0187US7256864B2Liquid immersion lithography system having a tilted showerhead relative to a substrateASML NETHERLANDS BV·Filed 2006·Granted Aug 14, 2007·7 cites·5 claims
- 0286US7253879B2Liquid immersion lithography system with tilted liquid flowASML HOLDING NV·Filed 2006·Granted Aug 7, 2007·6 cites·3 claims
- 0384US7474385B2Adjustable resolution interferometric lithography systemASML HOLDING NV·Filed 2006·Granted Jan 6, 2009·6 cites·19 claims
- 0478US7751030B2Interferometric lithographic projection apparatusASML HOLDING NV·Filed 2006·Granted Jul 6, 2010·5 cites·25 claims
- 0564US7492442B2Adjustable resolution interferometric lithography systemASML HOLDING NV·Filed 2004·Granted Feb 17, 2009·6 cites·15 claims
- 0650US2006232753A1Liquid immersion lithography system with tilted liquid flowASML HOLDING NV·Filed 2005·Application pending·0 cites
- 0747US8203693B2Liquid immersion lithography system comprising a tilted showerhead relative to a substrateKHMELICHEK ALEKSANDR·Filed 2006·Granted Jun 19, 2012·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →