Inventor · disambiguated record
Mitsugu Yamamura
Also filed as: YAMAMURA MITSUGU
5 granted patents·179 citations·filing 1984–1993
84Inventor score
Files withCANON KK5
Top patents by PatentIndex Score
5 records- 0192US4937618AAlignment and exposure apparatus and method for manufacture of integrated circuitsCANON KK·Filed 1989·Granted Jun 26, 1990·57 cites·3 claims
- 0284US4600282AAlignment apparatusCANON KK·Filed 1984·Granted Jul 15, 1986·43 cites·16 claims
- 0379US5050111AAlignment and exposure apparatus and method for manufacture of integrated circuitsCANON KK·Filed 1990·Granted Sep 17, 1991·31 cites·7 claims
- 0468US4669842AProjection optical deviceCANON KK·Filed 1984·Granted Jun 2, 1987·20 cites·10 claims
- 0557US5365342AAlignment and exposure apparatus and method for manufacture of integrated circuitsCANON KK·Filed 1993·Granted Nov 15, 1994·28 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →