Inventor · disambiguated record
Fahong Li
Also filed as: LI FAHONG
5 granted patents·2 citations·filing 2014–2019
62Inventor score
Top patents by PatentIndex Score
5 records- 0177US10571812B2Method of calibrating focus measurements, measurement method and metrology apparatus, lithographic system and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Feb 25, 2020·2 cites·15 claims
- 0253US11022899B2Method of measuring a focus parameter relating to a structure formed using a lithographic processASML NETHERLANDS BV·Filed 2019·Granted Jun 1, 2021·0 cites·13 claims
- 0351US9779672B2Oil puncture controlled starting system for EFD apparatus and manufacturing method thereforUNIV SOUTH CHINA NORMAL·Filed 2014·Granted Oct 3, 2017·0 cites·14 claims
- 0447US11181733B2Method for preparing electrowetting display support plateUNIV SOUTH CHINA NORMAL·Filed 2017·Granted Nov 23, 2021·0 cites·17 claims
- 0539US10310354B2Electrofluidic support plates and preparation method therefor, and electrofluidic apparatusACAD SHENZHEN GUOHUA OPTOELECTRONICS·Filed 2016·Granted Jun 4, 2019·0 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →