Inventor · disambiguated record
Benoit Barthod
Also filed as: BARTHOD BENOIT
7 granted patents·88 citations·filing 1994–2006
85Inventor score
Top patents by PatentIndex Score
7 records- 0180US7399981B2Apparatus for generating light in the extreme ultraviolet and use in a light source for extreme ultraviolet lithographyCOMMISSARIAT ENERGIE ATOMIQUE·Filed 2005·Granted Jul 15, 2008·20 cites·24 claims
- 0265US7515687B2Compact source with very bright X-ray beamALCATEL LUCENT·Filed 2006·Granted Apr 7, 2009·4 cites·13 claims
- 0365US7095038B2EUV sourceCIT ALCATEL·Filed 2004·Granted Aug 22, 2006·15 cites·20 claims
- 0462US6027317AScroll type machineCIT ALCATEL·Filed 1998·Granted Feb 22, 2000·19 cites·8 claims
- 0550US5439357AMagnetically guided positive-displacement machineCIT ALCATEL·Filed 1994·Granted Aug 8, 1995·13 cites·20 claims
- 0646US6050793AScroll type fluid displacement machineCIT ALCATEL·Filed 1998·Granted Apr 18, 2000·10 cites·1 claims
- 0734US5370508APositive-displacement machine having orbital motionCIT ALCATEL·Filed 1994·Granted Dec 6, 1994·7 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →