Inventor · disambiguated record
Chia-Chu Liu
Also filed as: LIU CHIA-CHU
41 granted patents·7 pending applications·173 citations·filing 2006–2025
97Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD25TAIWAN SEMICONDUCTOR MFG9LIU CHIA-CHU8WANG CHUNG-MING2CHANG YA-HUI1
Top patents by PatentIndex Score
48 records- 0196US8906595B2Method for improving resist pattern peelingTAIWAN SEMICONDUCTOR MFG·Filed 2012·Granted Dec 9, 2014·52 cites·17 claims
- 0296US8732626B2System and method of circuit layout for multiple cellsLIU CHIA-CHU·Filed 2012·Granted May 20, 2014·33 cites·20 claims
- 0392US9059001B2Semiconductor device with biased featureLIU CHIA-CHU·Filed 2012·Granted Jun 16, 2015·12 cites·20 claims
- 0491US8822343B2Enhanced FinFET process overlay markHSIEH CHI-WEN·Filed 2012·Granted Sep 2, 2014·14 cites·13 claims
- 0590US11392045B2Method for manufacturing semiconductor device and system for performing the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Jul 19, 2022·2 cites·20 claims
- 0690US9947764B2Dummy gate structure and methods thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Apr 17, 2018·5 cites·19 claims
- 0789US10418460B2Dummy gate structure and methods thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Sep 17, 2019·4 cites·20 claims
- 0889US9184101B2Method for removing semiconductor fins using alternating masksTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Nov 10, 2015·10 cites·20 claims
- 0987US9431513B2Dummy gate structure and methods thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Aug 30, 2016·6 cites·20 claims
- 1086US10859924B2Method for manufacturing semiconductor device and system for performing the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 8, 2020·4 cites·20 claims
- 1185US8932936B2Method of forming a FinFET deviceLIU CHIA-CHU·Filed 2012·Granted Jan 13, 2015·9 cites·19 claims
- 1278US8592137B2Methods for small trench patterning using chemical amplified photoresist compositionsCHANG YA HUI·Filed 2011·Granted Nov 26, 2013·3 cites·20 claims
- 1377US2025285877A1Feature patterning using pitch relaxation and directional end-pushing with ion bombardmentTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 1476US9093276B2Methods for small trench patterning using chemical amplified photoresist compositionsTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Jul 28, 2015·2 cites·20 claims
- 1576US8969922B2Field effect transistors and method of forming the sameLIU CHIA-CHU·Filed 2012·Granted Mar 3, 2015·5 cites·17 claims
- 1675US9711420B1Inline focus monitoringTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Jul 18, 2017·2 cites·20 claims
- 1774US12315737B2Feature patterning using pitch relaxation and directional end-pushing with ion bombardmentTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted May 27, 2025·0 cites·20 claims
- 1873US2025259843A1Dual critical dimension patterningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 1972US9026957B2Method of defining an intensity selective exposure photomaskTAIWAN SEMICONDUCTOR MFG·Filed 2014·Granted May 5, 2015·1 cites·15 claims
- 2071US9129974B2Enhanced FinFET process overlay markTAIWAN SEMICONDUCTOR MFG·Filed 2014·Granted Sep 8, 2015·2 cites·20 claims
- 2170US9274414B2Method for making a lithography maskTAIWAN SEMICONDUCTOR MFG·Filed 2014·Granted Mar 1, 2016·1 cites·20 claims
- 2267US12308233B2Dual critical dimension patterningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted May 20, 2025·0 cites·20 claims
- 2367US8840796B2Integrated circuit method with triple patterningTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Sep 23, 2014·1 cites·19 claims
- 2466US11688610B2Feature patterning using pitch relaxation and directional end-pushing with ion bombardmentTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Jun 27, 2023·0 cites·20 claims
- 2566US10276488B2Method of fabricating field effect transistor having non-orthogonal gate electrodeTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Apr 30, 2019·1 cites·20 claims
- 2666US9748107B2Method for removing semiconductor fins using alternating masksTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Aug 29, 2017·1 cites·20 claims
- 2765US10985261B2Dummy gate structure and methods thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Apr 20, 2021·0 cites·20 claims
- 2865US9793268B2Method and structure for gap filling improvementTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Oct 17, 2017·1 cites·20 claims
- 2965US8562843B2Integrated circuit method with triple patterningLIU CHIA-CHU·Filed 2011·Granted Oct 22, 2013·1 cites·21 claims
- 3061US2025372530A1Mark structure for nanostructure device and methods of forming the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 3160US8735994B2Electrical-free dummy gateLIU CHIA-CHU·Filed 2012·Granted May 27, 2014·1 cites·19 claims
- 3256US9507904B2System and method of circuit layout for multiple cellsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Nov 29, 2016·0 cites·20 claims
- 3355US11211323B2Method of fabricating field effect transistor having non-orthogonal gate electrodeTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Dec 28, 2021·0 cites·20 claims
- 3455US9766545B2Methods for small trench patterning using chemical amplified photoresist compositionsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Sep 19, 2017·0 cites·20 claims
- 3555US9281205B2Method for etching an ultra thin filmTAIWAN SEMICONDUCTOR MFG·Filed 2014·Granted Mar 8, 2016·0 cites·17 claims
- 3653US12507466B2Multi-gate transistor device including a plurality of gate lines with bridge portion and method for fabricating the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Dec 23, 2025·0 cites·20 claims
- 3753US9466528B2Method of making a structureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Oct 11, 2016·0 cites·20 claims
- 3851US10515953B2Method and structure for gap filling improvementTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Dec 24, 2019·0 cites·20 claims
- 3950US9607835B2Semiconductor device with biased featureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Mar 28, 2017·0 cites·20 claims
- 4048US9366969B2Methodology for implementing enhanced optical lithography for hole patterning in semiconductor fabricationTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Jun 14, 2016·0 cites·20 claims
- 4148US8872339B2Semiconductors structure with elements having different widths and methods of making the sameLIU CHIA-CHU·Filed 2012·Granted Oct 28, 2014·0 cites·20 claims
- 4247US2015318367A1Controlling Gate Formation for High Density Cell LayoutTAIWAN SEMICONDUCTOR MFG·Filed 2015·Application pending·0 cites
- 4345US2013320451A1Semiconductor device having non-orthogonal elementLIU CHIA-CHU·Filed 2012·Application pending·0 cites
- 4440US8877598B2Method of lithography process with an under isolation material layerWANG CHUNG-MING·Filed 2012·Granted Nov 4, 2014·0 cites·20 claims
- 4540US2014120729A1Method for removing a patterned hard mask layerTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2012·Application pending·0 cites
- 4639US8765363B2Method of forming a resist pattern with multiple post exposure baking stepsWANG CHUNG-MING·Filed 2012·Granted Jul 1, 2014·0 cites·20 claims
- 4739US8703392B2Method and apparatus for developing processLIU YU-LUN·Filed 2012·Granted Apr 22, 2014·0 cites·20 claims
- 4839US2007189530A1Management system for digital broadcast rights and a method thereofLIANG CHIA-KAI·Filed 2006·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →