Inventor · disambiguated record
Youichi Nakayama
Also filed as: NAKAYAMA YOUICHI
5 granted patents·22 citations·filing 2005–2013
74Inventor score
Top patents by PatentIndex Score
5 records- 0180US7266418B2Substrate processing apparatus, history information recording method, history information recording program, and history information recording systemTOKYO ELECTRON LTD·Filed 2005·Granted Sep 4, 2007·10 cites·10 claims
- 0278US7692916B2Capacitive coupling plasma processing apparatus and methodTOKYO ELECTRON LTD·Filed 2006·Granted Apr 6, 2010·6 cites·27 claims
- 0370US9070728B2Method of lowering temperature of substrate table, computer-readable storage medium, and substrate processing systemKOBAYASHI KENICHI·Filed 2010·Granted Jun 30, 2015·4 cites·15 claims
- 0458US9766617B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2013·Granted Sep 19, 2017·1 cites·6 claims
- 0554US8612038B2Target object processing system and method of controlling the sameKOBAYASHI KENICHI·Filed 2010·Granted Dec 17, 2013·1 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →