Inventor · disambiguated record
Yoichi Okita
Also filed as: OKITA YOICHI
14 granted patents·3 pending applications·124 citations·filing 2001–2012
91Inventor score
Top patents by PatentIndex Score
17 records- 0192US6720600B2FeRam semiconductor device with improved contact plug structureFUJITSU LTD·Filed 2002·Granted Apr 13, 2004·69 cites·10 claims
- 0274US7198960B2Method for fabricating ferroelectric capacitorFUJITSU LTD·Filed 2005·Granted Apr 3, 2007·5 cites·20 claims
- 0372US7700978B2Semiconductor device and method of manufacturing the sameFUJITSU MICROELECTRONICS LTD·Filed 2007·Granted Apr 20, 2010·3 cites·15 claims
- 0472US6825076B2Method of manufacturing the FeRAM semiconductor device with improved contact plug structureFUJITSU LTD·Filed 2004·Granted Nov 30, 2004·16 cites·10 claims
- 0570US8034676B2Semiconductor device and method of manufacturing the sameFUJITSU SEMICONDUCTOR LTD·Filed 2010·Granted Oct 11, 2011·2 cites·14 claims
- 0667US6926800B2Plasma etching method and apparatusFUJITSU LTD·Filed 2001·Granted Aug 9, 2005·8 cites·20 claims
- 0763US7547558B2Method for manufacturing semiconductor deviceFUJITSU MICROELECTRONICS LTD·Filed 2004·Granted Jun 16, 2009·11 cites·20 claims
- 0861US8044447B2Semiconductor device and method for manufacturing the sameFUJITSU SEMICONDUCTOR LTD·Filed 2008·Granted Oct 25, 2011·2 cites·20 claims
- 0957US6713798B2Semiconductor device having a capacitor and method of manufacturing the sameFUJITSU LTD·Filed 2001·Granted Mar 30, 2004·5 cites·13 claims
- 1052US6987045B2Semiconductor device and method of manufacturing the sameFUJITSU LTD·Filed 2004·Granted Jan 17, 2006·3 cites·11 claims
- 1148US7906033B2Plasma etching method and apparatusFUJITSU SEMICONDUCTOR LTD·Filed 2005·Granted Mar 15, 2011·0 cites·2 claims
- 1247US7595250B2Semiconductor device and method of manufacturing the sameFUJITSU MICROELECTRONICS LTD·Filed 2006·Granted Sep 29, 2009·0 cites·13 claims
- 1345US2007178698A1Substrate processing apparatus and fabrication process of a semiconductor deviceFUJITSU LTD·Filed 2006·Application pending·0 cites
- 1442US2012231553A1Substrate processing apparatus and fabrication process of a semiconductor deviceOKITA YOICHI·Filed 2012·Application pending·0 cites
- 1541US7550799B2Semiconductor device and fabrication method of a semiconductor deviceFUJITSU MICROELECTRONICS LTD·Filed 2005·Granted Jun 23, 2009·0 cites·15 claims
- 1637US7102186B2Semiconductor device and method of manufacturing the sameFUJITSU LTD·Filed 2003·Granted Sep 5, 2006·0 cites·6 claims
- 1737US2003235944A1Semiconductor device manufacturing methodFUJITSU LTD·Filed 2003·Application pending·0 cites
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