Inventor · disambiguated record
Takamitsu Takayama
Also filed as: TAKAYAMA TAKAMITSU
8 granted patents·6 pending applications·111 citations·filing 1992–2025
83Inventor score
Top patents by PatentIndex Score
14 records- 0178US5438415AEllipsometer and method of controlling coating thickness therewithNIPPON KOKAN KK·Filed 1992·Granted Aug 1, 1995·44 cites·8 claims
- 0276US12090529B2Method of cleaning stage in plasma processing apparatus, and the plasma processing apparatusTOKYO ELECTRON LTD·Filed 2023·Granted Sep 17, 2024·0 cites·17 claims
- 0373US2025006473A1Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0472US2024347325A1Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0567US6004031ATemperature measuring deviceNIPPON KOKAN KK·Filed 1996·Granted Dec 21, 1999·35 cites·9 claims
- 0663US5730527AMethod and apparatus for measuring temperature using an optical fiberNIPPON KOKAN KK·Filed 1996·Granted Mar 24, 1998·32 cites·4 claims
- 0762US11865591B2Method of cleaning stage in plasma processing apparatus, and the plasma processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Jan 9, 2024·0 cites·12 claims
- 0859US2024087858A1Cleaning method and plasma processing methodTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0953US2025210308A1Plasma processing apparatus and control methodTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 1052US2025239476A1Etching method, precoat method, and etching apparatusTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 1151US9330891B2Plasma processing method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2014·Granted May 3, 2016·0 cites·14 claims
- 1245US8263181B2Ti-based film forming method and storage mediumNARUSHIMA KENSAKU·Filed 2009·Granted Sep 11, 2012·0 cites·20 claims
- 1335US2017004984A1Substrate transfer apparatus and substrate transfer methodTOKYO ELECTRON LTD·Filed 2016·Application pending·0 cites
- 1434US10192719B2Plasma processing methodTOKYO ELECTRON LTD·Filed 2015·Granted Jan 29, 2019·0 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →