Inventor · disambiguated record
Denis Syomin
Also filed as: SYOMIN DENIS · SYOMIN DENIS ANDREIEVICH
2 granted patents·2 pending applications·5 citations·filing 2010–2022
48Inventor score
Top patents by PatentIndex Score
4 records- 0176US8440573B2Method and apparatus for pattern collapse free wet processing of semiconductor devicesMIKHAYLICHENKO KATRINA·Filed 2010·Granted May 14, 2013·4 cites·20 claims
- 0255US8324114B2Method and apparatus for silicon oxide residue removalMIKHAYLICHENKO KATRINA·Filed 2010·Granted Dec 4, 2012·1 cites·18 claims
- 0351US2024379375A1Method and apparatus for etching a carbon containing layerLAM RES CORP·Filed 2022·Application pending·0 cites
- 0433US2011139183A1System and method of preventing pattern collapse using low surface tension fluidMIKHAYLICHENKO KATRINA·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →