Inventor · disambiguated record

Russell E. Lewis

Also filed as: LEWIS RUSSELL E

1 granted patent·77 citations·filing 1992–1992

52Inventor score

Technology areasH10P

Files withLUXTRON CORP1

Top patents by PatentIndex Score

1 record

0179US5308447AEndpoint and uniformity determinations in material layer processing through monitoring multiple surface regions across the layerLUXTRON CORP·Filed 1992·Granted May 3, 1994·77 cites·34 claims

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