Inventor · disambiguated record
Scott Stevenot
Also filed as: STEVENOT SCOTT · STEVENOT SCOTT JEFFERY
7 granted patents·94 citations·filing 2006–2018
84Inventor score
Top patents by PatentIndex Score
7 records- 0195US8552334B2Adjustable gap capacitively coupled RF plasma reactor including lateral bellows and non-contact particle sealTAPPAN JAMES E·Filed 2009·Granted Oct 8, 2013·68 cites·17 claims
- 0287US8735765B2Adjustable gap capacitively coupled RF plasma reactor including lateral bellows and non-contact particle sealLAM RES CORP·Filed 2013·Granted May 27, 2014·7 cites·9 claims
- 0387US8043430B2Methods and apparatuses for controlling gas flow conductance in a capacitively-coupled plasma processing chamberLAM RES CORP·Filed 2006·Granted Oct 25, 2011·12 cites·12 claims
- 0480US10141670B1Substrate connector including a spring pin assembly for electrostatic chucksLAM RES CORP·Filed 2017·Granted Nov 27, 2018·3 cites·14 claims
- 0574US10892197B2Edge seal configurations for a lower electrode assemblyLAM RES CORP·Filed 2018·Granted Jan 12, 2021·1 cites·16 claims
- 0672US10090211B2Edge seal for lower electrode assemblyLAM RES CORP·Filed 2013·Granted Oct 2, 2018·2 cites·19 claims
- 0764US8784948B2Methods and apparatuses for controlling gas flow conductance in a capacitively-coupled plasma processing chamberDHINDSA RAJINDER·Filed 2011·Granted Jul 22, 2014·1 cites·10 claims
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