Inventor · disambiguated record
Tetsuzo Tanimoto
Also filed as: TANIMOTO TETSUZO
3 granted patents·163 citations·filing 1989–1994
77Inventor score
Files withHITACHI LTD3
Top patents by PatentIndex Score
3 records- 0194US5016149AIlluminating method and illuminating apparatus for carrying out the same, and projection exposure method and projection exposure apparatus for carrying out the sameHITACHI LTD·Filed 1989·Granted May 14, 1991·92 cites·23 claims
- 0280US5227862AProjection exposure apparatus and projection exposure methodHITACHI LTD·Filed 1990·Granted Jul 13, 1993·47 cites·63 claims
- 0371US6094268AProjection exposure apparatus and projection exposure methodHITACHI LTD·Filed 1994·Granted Jul 25, 2000·24 cites·23 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →