Inventor · disambiguated record
Allan Rosencwaig
Also filed as: ROSENCWAIG ALLAN
59 granted patents·4 pending applications·6,366 citations·filing 1973–2009
99Inventor score
Top patents by PatentIndex Score
63 records- 0199US6972852B2Critical dimension analysis with simultaneous multiple angle of incidence measurementsTHERMA WAVE INC·Filed 2004·Granted Dec 6, 2005·183 cites·24 claims
- 0299US6813034B2Analysis of isolated and aperiodic structures with simultaneous multiple angle of incidence measurementsTHERMA WAVE INC·Filed 2002·Granted Nov 2, 2004·233 cites·15 claims
- 0399US6429943B1Critical dimension analysis with simultaneous multiple angle of incidence measurementsTHERMA WAVE INC·Filed 2001·Granted Aug 6, 2002·463 cites·84 claims
- 0499US6297880B1Apparatus for analyzing multi-layer thin film stacks on semiconductorsTHERMA WAVE INC·Filed 2000·Granted Oct 2, 2001·172 cites·13 claims
- 0599US6278519B1Apparatus for analyzing multi-layer thin film stacks on semiconductorsTHERMA WAVE INC·Filed 1998·Granted Aug 21, 2001·210 cites·49 claims
- 0699US5181080AMethod and apparatus for evaluating the thickness of thin filmsTHERMA WAVE INC·Filed 1991·Granted Jan 19, 1993·291 cites·34 claims
- 0798US7061627B2Optical scatterometry of asymmetric lines and structuresTHERMA WAVE INC·Filed 2003·Granted Jun 13, 2006·153 cites·8 claims
- 0898US5412473AMultiple angle spectroscopic analyzer utilizing interferometric and ellipsometric devicesTHERMA WAVE INC·Filed 1993·Granted May 2, 1995·241 cites·34 claims
- 0998US5159412AOptical measurement device with enhanced sensitivityTHERMA WAVE INC·Filed 1991·Granted Oct 27, 1992·190 cites·13 claims
- 1098US5042951AHigh resolution ellipsometric apparatusTHERMA WAVE INC·Filed 1989·Granted Aug 27, 1991·483 cites·24 claims
- 1198US4999014AMethod and apparatus for measuring thickness of thin filmsTHERMA WAVE INC·Filed 1989·Granted Mar 12, 1991·539 cites·44 claims
- 1298US4854710AMethod and apparatus for evaluating surface and subsurface features in a semiconductorTHERMA WAVE INC·Filed 1987·Granted Aug 8, 1989·188 cites·34 claims
- 1398US4636088AMethod and apparatus for evaluating surface conditions of a sampleTHERMA WAVE INC·Filed 1984·Granted Jan 13, 1987·165 cites·27 claims
- 1498US4522510AThin film thickness measurement with thermal wavesTHERMA WAVE INC·Filed 1983·Granted Jun 11, 1985·199 cites·20 claims
- 1598US4255971AThermoacoustic microscopyROSENCWAIG ALLAN·Filed 1978·Granted Mar 17, 1981·183 cites·34 claims
- 1697US4750822AMethod and apparatus for optically detecting surface states in materialsTHERMA WAVE INC·Filed 1986·Granted Jun 14, 1988·179 cites·28 claims
- 1797US4513384AThin film thickness measurements and depth profiling utilizing a thermal wave detection systemTHERMA WAVE INC·Filed 1982·Granted Apr 23, 1985·129 cites·12 claims
- 1897US4257798AMethod for introduction of gases into microspheresUS ENERGY·Filed 1979·Granted Mar 24, 1981·102 cites·9 claims
- 1996US6842259B2Analysis of isolated and aperiodic structures with simultaneous multiple angle of incidence measurementsTHERMA WAVE INC·Filed 2004·Granted Jan 11, 2005·71 cites·14 claims
- 2096US5596406ASample characteristic analysis utilizing multi wavelength and multi angle polarization and magnitude change detectionTHERMA WAVE INC·Filed 1995·Granted Jan 21, 1997·203 cites·9 claims
- 2196US4679946AEvaluating both thickness and compositional variables in a thin film sampleTHERMA WAVE INC·Filed 1984·Granted Jul 14, 1987·115 cites·17 claims
- 2296US4579463ADetecting thermal waves to evaluate thermal parametersTHERMA WAVE PARTNERS·Filed 1984·Granted Apr 1, 1986·187 cites·7 claims
- 2395US6654131B2Critical dimension analysis with simultaneous multiple angle of incidence measurementsTHERMA WAVE INC·Filed 2002·Granted Nov 25, 2003·50 cites·19 claims
- 2495US4521118AMethod for detection of thermal waves with a laser probeTHERMA WAVE INC·Filed 1982·Granted Jun 4, 1985·94 cites·15 claims
- 2595US3948345AMethods and means for analyzing substancesROSENCWAIG ALLAN·Filed 1973·Granted Apr 6, 1976·69 cites·13 claims
- 2694US6417921B2Apparatus for analyzing multi-layer thin film stacks on semiconductorsTHERMA WAVE INC·Filed 2001·Granted Jul 9, 2002·49 cites·14 claims
- 2794US6408048B2Apparatus for analyzing samples using combined thermal wave and X-ray reflectance measurementsTHERMA WAVE INC·Filed 2001·Granted Jun 18, 2002·49 cites·18 claims
- 2894US5042952AMethod and apparatus for evaluating surface and subsurface and subsurface features in a semiconductorTHERMA WAVE INC·Filed 1990·Granted Aug 27, 1991·113 cites·5 claims
- 2994US4634290AMethod and apparatus for detecting thermal wavesTHERMA WAVE INC·Filed 1985·Granted Jan 6, 1987·109 cites·8 claims
- 3094US4632561AEvaluation of surface and subsurface characteristics of a sampleTHERMA WAVE INC·Filed 1985·Granted Dec 30, 1986·109 cites·12 claims
- 3192US6754305B1Measurement of thin films and barrier layers on patterned wafers with X-ray reflectometryTHERMA WAVE INC·Filed 2000·Granted Jun 22, 2004·58 cites·28 claims
- 3292US5657754AApparatus for non-invasive analyses of biological compoundsFiled 1995·Granted Aug 19, 1997·114 cites·78 claims
- 3392US4484820AMethod for evaluating the quality of the bond between two members utilizing thermoacoustic microscopyTHERMA WAVE INC·Filed 1982·Granted Nov 27, 1984·70 cites·57 claims
- 3490US7248375B2Critical dimension analysis with simultaneous multiple angle of incidence measurementsTHERMA WAVE INC·Filed 2005·Granted Jul 24, 2007·15 cites·16 claims
- 3590US7068370B2Optical inspection equipment for semiconductor wafers with precleaningTHERMA WAVE INC·Filed 2005·Granted Jun 27, 2006·12 cites·10 claims
- 3690US6829057B2Critical dimension analysis with simultaneous multiple angle of incidence measurementsTHERMA WAVE INC·Filed 2003·Granted Dec 7, 2004·30 cites·7 claims
- 3789US4952063AMethod and apparatus for evaluating surface and subsurface features in a semiconductorTHERMA WAVE INC·Filed 1989·Granted Aug 28, 1990·71 cites·34 claims
- 3889US4795260AApparatus for locating and testing areas of interest on a workpieceTHERMA WAVE INC·Filed 1987·Granted Jan 3, 1989·102 cites·23 claims
- 3987US5228776AApparatus for evaluating thermal and electrical characteristics in a sampleTHERMA WAVE INC·Filed 1992·Granted Jul 20, 1993·95 cites·23 claims
- 4084US7362441B2Modulated reflectance measurement system using UV probeKLA TENCOR CORP·Filed 2006·Granted Apr 22, 2008·6 cites·12 claims
- 4184US6567213B2Apparatus for analyzing multi-layer thin film stacks on semiconductorsTHERMA WAVE INC·Filed 2002·Granted May 20, 2003·19 cites·14 claims
- 4283US6781692B1Method of monitoring the fabrication of thin film layers forming a DWDM filterTHERMA WAVE INC·Filed 2001·Granted Aug 24, 2004·21 cites·44 claims
- 4380US7286243B2Beam profile complex reflectance system and method for thin film and critical dimension measurementsARIST INSTR INC·Filed 2005·Granted Oct 23, 2007·15 cites·61 claims
- 4479US6583875B1Monitoring temperature and sample characteristics using a rotating compensator ellipsometerTHERMA WAVE INC·Filed 2000·Granted Jun 24, 2003·22 cites·11 claims
- 4579US4028932APhoto acoustic cellHOFFMANN LA ROCHE·Filed 1975·Granted Jun 14, 1977·28 cites·25 claims
- 4677US7646486B2Modulated reflectance measurement system using UV probeKLA TENCOR CORP·Filed 2008·Granted Jan 12, 2010·3 cites·33 claims
- 4776US8817260B2Modulated reflectance measurement system using UV probeOPSAL JON·Filed 2009·Granted Aug 26, 2014·4 cites·7 claims
- 4875US6512815B2Apparatus for analyzing samples using combined thermal wave and X-ray reflectance measurementsTHERMA WAVE INC·Filed 2002·Granted Jan 28, 2003·9 cites·6 claims
- 4975US5149978AApparatus for measuring grain sizes in metalized layersTHERMA WAVE INC·Filed 1990·Granted Sep 22, 1992·40 cites·16 claims
- 5074US6930771B2Optical inspection equipment for semiconductor wafers with precleaningTHERMA WAVE INC·Filed 2003·Granted Aug 16, 2005·12 cites·7 claims
Showing the top 50 of 63 patent records by PatentIndex Score.
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