Inventor · disambiguated record
Tsuneo Miyai
Also filed as: MIYAI TSUNEO
4 granted patents·1 pending application·293 citations·filing 1995–2003
81Inventor score
Files withNIKON CORP5
Top patents by PatentIndex Score
5 records- 0196US5581324AThermal distortion compensated projection exposure method and apparatus for manufacturing semiconductorsNIKON CORP·Filed 1995·Granted Dec 3, 1996·206 cites·24 claims
- 0278US5825470AExposure apparatusNIKON CORP·Filed 1996·Granted Oct 20, 1998·63 cites·24 claims
- 0365US6900880B2Exposure apparatus, surface position adjustment unit, mask, and device manufacturing methodNIKON CORP·Filed 2003·Granted May 31, 2005·9 cites·29 claims
- 0453US5936711AProjection exposure method and projection exposure apparatusNIKON CORP·Filed 1997·Granted Aug 10, 1999·15 cites·28 claims
- 0537US2002003216A1Exposure apparatus, surface position adjustment unit, mask, and device manufacturing methodNIKON CORP·Filed 2001·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Tsuneo Miyai files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →