Inventor · disambiguated record
Daniel Towery
Also filed as: TOWERY DANIEL · TOWERY DANIEL L · TOWERY DANIEL LYNNE
7 granted patents·3 pending applications·305 citations·filing 1998–2004
88Inventor score
Top patents by PatentIndex Score
10 records- 0192US6407006B1Method for integrated circuit planarizationHONEYWELL INT INC·Filed 2000·Granted Jun 18, 2002·63 cites·23 claims
- 0287US6630433B2Composition for chemical mechanical planarization of copper, tantalum and tantalum nitrideHONEYWELL INT INC·Filed 2000·Granted Oct 7, 2003·39 cites·8 claims
- 0384US6270395B1Oxidizing polishing slurries for low dielectric constant materialsALLIED SIGNAL INC·Filed 1998·Granted Aug 7, 2001·64 cites·18 claims
- 0484US6152148AMethod for cleaning semiconductor wafers containing dielectric filmsHONEYWELL INC·Filed 1998·Granted Nov 28, 2000·84 cites·2 claims
- 0577US6153525AMethods for chemical mechanical polish of organic polymer dielectric filmsALLIED SIGNAL INC·Filed 1998·Granted Nov 28, 2000·52 cites·19 claims
- 0645US6821190B1Static pad conditionerSILTERRA MALAYSIA SDN BHD·Filed 2002·Granted Nov 23, 2004·2 cites·18 claims
- 0739US7175515B2Static pad conditionerSILTERRA·Filed 2004·Granted Feb 13, 2007·1 cites·7 claims
- 0837US2003073311A1Compositions and processes for spin etch planarizationFiled 2002·Application pending·0 cites
- 0934US2001036749A1Apparatus and methods for integrated circuit planarizationFiled 2001·Application pending·0 cites
- 1027US2001054706A1Compositions and processes for spin etch planarizationFiled 1999·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →