Inventor · disambiguated record
Helen E. Rebenne
Also filed as: REBENNE HELEN E
11 granted patents·772 citations·filing 1988–1998
93Inventor score
Top patents by PatentIndex Score
11 records- 0194US5273588ASemiconductor wafer processing CVD reactor apparatus comprising contoured electrode gas directing meansMATERIALS RESEARCH CORP·Filed 1992·Granted Dec 28, 1993·228 cites·9 claims
- 0293US5370739ARotating susceptor semiconductor wafer processing cluster tool module useful for tungsten CVDMATERIALS RESEARCH CORP·Filed 1992·Granted Dec 6, 1994·188 cites·67 claims
- 0391US5863023AValved coupling for ultra high purtiy gas distribution systemAEROQUIP CORP·Filed 1997·Granted Jan 26, 1999·57 cites·9 claims
- 0491US5356476ASemiconductor wafer processing method and apparatus with heat and gas flow controlMATERIALS RESEARCH CORP·Filed 1992·Granted Oct 18, 1994·151 cites·38 claims
- 0569US5810031AUltra high purity gas distribution component with integral valved coupling and methods for its useAEROQUIP CORP·Filed 1996·Granted Sep 22, 1998·24 cites·21 claims
- 0667US6035609AUltra high purity gas distribution component with integral valved coupling and methods for its useAEROQUIP CORP·Filed 1998·Granted Mar 14, 2000·22 cites·6 claims
- 0767US5664759AValved coupling for ultra high purity gas distribution systemsAEROQUIP CORP·Filed 1996·Granted Sep 9, 1997·26 cites·10 claims
- 0864US4890574AInternal reactor for chemical vapor depositionGTE LABORATORIES INC·Filed 1988·Granted Jan 2, 1990·22 cites·11 claims
- 0963US5434110AMethods of chemical vapor deposition (CVD) of tungsten films on patterned wafer substratesMATERIALS RESEARCH CORP·Filed 1992·Granted Jul 18, 1995·35 cites·2 claims
- 1049US5924447AUltra high purity gas distribution component with integral valved coupling and methods for its useAEROQUIP CORP·Filed 1998·Granted Jul 20, 1999·10 cites·12 claims
- 1144US4957780AInternal reactor method for chemical vapor depositionGTE LABORATORIES INC·Filed 1989·Granted Sep 18, 1990·9 cites·6 claims
Join the waitlist — get patent alerts
Get an alert when Helen E. Rebenne files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →