Inventor · disambiguated record
Chun-Lin Chang
Also filed as: CHANG CHUN-LIN · CHANG CHUN-LIN LOUIS
60 granted patents·10 pending applications·128 citations·filing 2000–2024
98Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD46HWANG CHIH-HONG4CHANG CHUN-LIN3TAIWAN SEMICONDUCTOR MFG3CHENG NAI-HAN2
Top patents by PatentIndex Score
70 records- 0197US10429729B2EUV radiation modification methods and systemsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Oct 1, 2019·7 cites·20 claims
- 0296US10524345B2Residual gain monitoring and reduction for EUV drive laserTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 31, 2019·9 cites·20 claims
- 0394US11437161B1Lithography apparatus and method for using the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Sep 6, 2022·2 cites·20 claims
- 0494US8404572B2Multi-zone temperature control for semiconductor waferCHANG CHUN-LIN·Filed 2009·Granted Mar 26, 2013·40 cites·20 claims
- 0593US11720035B2Mitigating long-term energy decay of laser devicesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Aug 8, 2023·2 cites·20 claims
- 0693US11419203B2EUV radiation modification methods and systemsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Aug 16, 2022·2 cites·20 claims
- 0793US10917959B2EUV radiation modification methods and systemsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Feb 9, 2021·3 cites·20 claims
- 0892US12147166B2Mitigating long-term energy decay of laser devicesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Nov 19, 2024·1 cites·20 claims
- 0991US10718718B2EUV vessel inspection method and related systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jul 21, 2020·4 cites·20 claims
- 1090US10113233B2Multi-zone temperature control for semiconductor waferTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Oct 30, 2018·6 cites·14 claims
- 1189US11800626B2Shock wave visualization for extreme ultraviolet plasma optimizationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Oct 24, 2023·1 cites·20 claims
- 1289US10980100B2Residual gain monitoring and reduction for EUV drive laserTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Apr 13, 2021·2 cites·20 claims
- 1388US11675272B2Method and apparatus for mitigating contaminationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Jun 13, 2023·1 cites·20 claims
- 1487US10429314B2EUV vessel inspection method and related systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Oct 1, 2019·3 cites·20 claims
- 1587US8309444B2System and method of dosage profile controlHUI KEUNG·Filed 2010·Granted Nov 13, 2012·8 cites·16 claims
- 1686US11452197B2Shock wave visualization for extreme ultraviolet plasma optimizationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Sep 20, 2022·2 cites·20 claims
- 1785US12009177B2Detection using semiconductor detectorTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Jun 11, 2024·1 cites·20 claims
- 1883US2024385542A1Mitigating long-term energy decay of laser devicesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1982US2024385540A1Semiconductor processing tool and methods of operationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 2081US9105591B2Rotatable and tunable heaters for semiconductor furnaceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Aug 11, 2015·4 cites·6 claims
- 2180US9324910B2Light emitting diodeTSMC SOLID STATE LIGHTING LTD·Filed 2014·Granted Apr 26, 2016·3 cites·20 claims
- 2280US9042509B2Liquid crystal display and bidirectional shift register device thereofHANNSTAR DISPLAY CORP·Filed 2013·Granted May 26, 2015·7 cites·12 claims
- 2380US9023664B2Multi-zone temperature control for semiconductor waferTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted May 5, 2015·3 cites·11 claims
- 2479US11723141B2EUV radiation generation methods and systemsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Aug 8, 2023·0 cites·20 claims
- 2578US12347997B2Methods and systems for aligning master oscillator power amplifier systemsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Jul 1, 2025·0 cites·20 claims
- 2678US12114412B2Shock wave visualization for extreme ultraviolet plasma optimizationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Oct 8, 2024·0 cites·20 claims
- 2778US11212903B2Apparatus and method for generating extreme ultraviolet radiationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Dec 28, 2021·1 cites·20 claims
- 2878US10509311B1Apparatus and method for generating an electromagnetic radiationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 17, 2019·1 cites·20 claims
- 2977US12130555B2Method and apparatus for mitigating contaminationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Oct 29, 2024·0 cites·20 claims
- 3077US10697084B2High resistance virtual anode for electroplating cellTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Jun 30, 2020·0 cites·20 claims
- 3177US2024381515A1Apparatus and method for generating extreme ultraviolet radiationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 3276US11608566B2High resistance virtual anode for electroplating cellTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Mar 21, 2023·0 cites·20 claims
- 3376US2024369938A1Method and apparatus for mitigating contaminationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 3475US9006676B2Apparatus for monitoring ion implantationTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Apr 14, 2015·2 cites·20 claims
- 3574US12265336B2Semiconductor processing tool and methods of operationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Apr 1, 2025·0 cites·20 claims
- 3674US11973302B2Methods and systems for aligning master oscillator power amplifier systemsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Apr 30, 2024·0 cites·20 claims
- 3774US2022338333A1Euv light source and apparatus for lithographyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Application pending·0 cites
- 3874US2024290575A1Detection using semiconductor detectorTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 3973US12133319B2Apparatus and method for generating extreme ultraviolet radiationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Oct 29, 2024·0 cites·20 claims
- 4072US11737200B2Residual gain monitoring and reduction for EUV drive laserTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Aug 22, 2023·0 cites·20 claims
- 4172US10852191B2Light source system and polarization angle adjusting methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Dec 1, 2020·1 cites·20 claims
- 4270US11092555B2EUV vessel inspection method and related systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Aug 17, 2021·0 cites·20 claims
- 4370US6644091B2Lower die for a bending machineHON HAI PREC IND CO LTD·Filed 2000·Granted Nov 11, 2003·9 cites·4 claims
- 4469US10167567B2High resistance virtual anode for electroplating cellTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Jan 1, 2019·0 cites·19 claims
- 4565US8536491B2Rotatable and tunable heaters for semiconductor furnaceWEI ZIN-CHANG·Filed 2009·Granted Sep 17, 2013·2 cites·17 claims
- 4664US11199767B2Apparatus and method for generating an electromagnetic radiationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Dec 14, 2021·0 cites·20 claims
- 4764US8716128B2Methods of forming through silicon via openingsCHERN CHYI SHYUAN·Filed 2011·Granted May 6, 2014·1 cites·9 claims
- 4860US11979971B2EUV light source and apparatus for lithographyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted May 7, 2024·0 cites·15 claims
- 4959US11588293B2Methods and systems for aligning master oscillator power amplifier systemsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Feb 21, 2023·0 cites·20 claims
- 5056US9224636B2Methods of forming through silicon via openingsTSMC SOLID STATE LIGHTING LTD·Filed 2014·Granted Dec 29, 2015·0 cites·15 claims
Showing the top 50 of 70 patent records by PatentIndex Score.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →