Inventor · disambiguated record
Yuya Nonaka
Also filed as: NONAKA YUYA
4 granted patents·2 pending applications·927 citations·filing 2008–2021
79Inventor score
Top patents by PatentIndex Score
6 records- 0196US9365924B2Method for forming film by plasma-assisted deposition using two-frequency combined pulsed RF powerASM IP HOLDING BV·Filed 2013·Granted Jun 14, 2016·463 cites·15 claims
- 0295US9899291B2Method for protecting layer by forming hydrocarbon-based extremely thin filmASM IP HOLDING BV·Filed 2015·Granted Feb 20, 2018·463 cites·16 claims
- 0373US10526704B2Film forming apparatusASM IP HOLDING BV·Filed 2015·Granted Jan 7, 2020·1 cites·4 claims
- 0456US2023304144A1Film formation deviceSHINCRON CO LTD·Filed 2021·Application pending·0 cites
- 0546US2010151151A1Method of forming low-k film having chemical resistanceASM JAPAN·Filed 2008·Application pending·0 cites
- 0642US11761084B2Substrate processing apparatus and method of processing substrateASM IP HOLDING BV·Filed 2016·Granted Sep 19, 2023·0 cites·5 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →