Inventor · disambiguated record
Suresh Lakkapragada
Also filed as: LAKKAPRAGADA SURESH
4 granted patents·1 pending application·220 citations·filing 2001–2008
79Inventor score
Technology areasH10P
Top patents by PatentIndex Score
5 records- 0196US6987572B2Methods and systems for lithography process controlKLA TENCOR TECH CORP·Filed 2003·Granted Jan 17, 2006·143 cites·26 claims
- 0294US6689519B2Methods and systems for lithography process controlKLA TENCOR TECH CORP·Filed 2001·Granted Feb 10, 2004·75 cites·28 claims
- 0365US7767956B2Methods and systems for lithography process controlKLA TENCOR TECH CORP·Filed 2008·Granted Aug 3, 2010·1 cites·19 claims
- 0464US7462814B2Methods and systems for lithography process controlKLA TENCOR TECH CORP·Filed 2006·Granted Dec 9, 2008·1 cites·21 claims
- 0540US2004005507A1Methods and systems for lithography process controlKLA TENCOR INC·Filed 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →