Inventor · disambiguated record
Kimihiro Okada
Also filed as: OKADA KIMIHIRO
6 granted patents·1 pending application·81 citations·filing 1997–2008
82Inventor score
Top patents by PatentIndex Score
7 records- 0187US5942356APhase shift mask and phase shift mask blankHOYA CORP·Filed 1997·Granted Aug 24, 1999·56 cites·32 claims
- 0272US7556892B2Halftone phase shift mask blank, halftone phase shift mask, and pattern transfer methodSHINETSU CHEMICAL CO·Filed 2005·Granted Jul 7, 2009·3 cites·28 claims
- 0369US6242138B1Phase shift mask and phase shift mask blankHOYA CORP·Filed 2000·Granted Jun 5, 2001·8 cites·19 claims
- 0457US7598004B2Film-depositing target and preparation of phase shift mask blankSHINETSU CHEMICAL CO·Filed 2005·Granted Oct 6, 2009·0 cites·5 claims
- 0556US6475681B2Phase shift mask and phase shift mask blankHOYA CORP·Filed 2001·Granted Nov 5, 2002·3 cites·16 claims
- 0654US6153341APhase shift mask and phase shift mask blankHOYA CORP·Filed 1999·Granted Nov 28, 2000·11 cites·6 claims
- 0754US2009057143A1Film-depositing target and preparation of phase shift mask blankYOSHIKAWA HIROKI·Filed 2008·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →