Inventor · disambiguated record
Andreas Birkner
Also filed as: BIRKNER ANDREAS
13 granted patents·5 pending applications·164 citations·filing 1982–2024
91Inventor score
Files withINTEGRATED DYNAMICS ENG GMBH5LEICA MICROSYSTEMS5HEILAND PETER2BIRKNER ANDREAS1BROOKS AUTOMATION INC1
Top patents by PatentIndex Score
18 records- 0186US6962471B2Substrate conveying module and system made up of substrate conveying module and workstationLEICA MICROSYSTEMS·Filed 2001·Granted Nov 8, 2005·44 cites·11 claims
- 0286US6736582B1Device for manipulating an object for loading and unloading a clean roomBROOKS AUTOMATION INC·Filed 2000·Granted May 18, 2004·40 cites·8 claims
- 0382US8089622B2Device and method for evaluating defects in the edge area of a wafer and use of the device in inspection system for wafersBIRKNER ANDREAS·Filed 2008·Granted Jan 3, 2012·13 cites·20 claims
- 0476US2024357784A1Method for processing substrates, in particular wafers, masks or flat panel displays, with a semi-conductor industry machineINTEGRATED DYNAMICS ENG GMBH·Filed 2024·Application pending·0 cites
- 0572US10322919B2Maintenance apparatusINTEGRATED DYNAMICS ENG GMBH·Filed 2017·Granted Jun 18, 2019·2 cites·12 claims
- 0669US5605428ADevice for indexing magazine compartments and wafer-shaped objects in the compartmentsJENOPTIK JENA GMBH·Filed 1993·Granted Feb 25, 1997·45 cites·2 claims
- 0764US12063745B2Method for processing substrates, in particular wafers, masks or flat panel displays, with a semi-conductor industry machineINTEGRATED DYNAMICS ENG GMBH·Filed 2021·Granted Aug 13, 2024·0 cites·13 claims
- 0860US7028565B2Method and arrangement for transporting and inspecting semiconductor substratesLEICA MICROSYSTEMS·Filed 2004·Granted Apr 18, 2006·6 cites·3 claims
- 0958US2025050823A1Cover element for a center consoleNOVEM CAR INTERIOR DESIGN GMBH·Filed 2024·Application pending·0 cites
- 1052US12444634B2Device and method for imaging an object in at least two viewsINTEGRATED DYNAMICS ENG GMBH·Filed 2021·Granted Oct 14, 2025·0 cites·27 claims
- 1145US6553850B2Method and arrangement for transporting and inspecting semiconductor substratesLEICA MICROSYSTEMS·Filed 2002·Granted Apr 29, 2003·1 cites·12 claims
- 1243US2013050931A1System and method for cooling a processing systemHEILAND PETER·Filed 2010·Application pending·0 cites
- 1343US2013205822A1System and method for cooling a computer systemHEILAND PETER·Filed 2011·Application pending·0 cites
- 1442US6845174B2Arrangement and method for the identification of substratesLEICA MICROSYSTEMS·Filed 2002·Granted Jan 18, 2005·4 cites·13 claims
- 1540US6789436B2Method and arrangement for transporting and inspecting semiconductor substratesLEICA MICROSYSTEMS·Filed 2003·Granted Sep 14, 2004·0 cites·6 claims
- 1633US4406790AMethod for operating a biological sewage purification plantOTTO & CO GMBH DR C·Filed 1982·Granted Sep 27, 1983·4 cites·4 claims
- 1732US5636724ADevice for transferring a transport object between two end positionsJENOPTIK TECHNOLOGIE GMBH·Filed 1995·Granted Jun 10, 1997·5 cites·16 claims
- 1830US2018155126A1Service cartINTEGRATED DYNAMICS ENG GMBH·Filed 2016·Application pending·0 cites
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