Inventor · disambiguated record

Marnix Aldert Tas

Also filed as: TAS MARNIX ALDERT

2 granted patents·1 pending application·15 citations·filing 2001–2010

56Inventor score

Technology areasG03F G01N

Files withASML NETHERLANDS BV1 VAN BOXMEER JOHAN MARIA1 ZEISS CARL SEMICONDUCTOR MFG1

Top patents by PatentIndex Score

3 records

0170US6733165B2Optical integrator for an illumination deviceZEISS CARL SEMICONDUCTOR MFG·Filed 2001·Granted May 11, 2004·13 cites·42 claims
0254US8994921B2Scatterometer and lithographic apparatusVAN BOXMEER JOHAN MARIA·Filed 2009·Granted Mar 31, 2015·2 cites·16 claims
0333US2011007316A1Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing MethodASML NETHERLANDS BV·Filed 2010·Application pending·0 cites

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →