Inventor · disambiguated record

Jacobus Burghoom

Also filed as: BURGHOOM JACOBUS · BURGHOORN JACOBUS

2 granted patents·28 citations·filing 2001–2004

63Inventor score

Technology areasF41H G03F

Files withASML NETHERLANDS BV2

Top patents by PatentIndex Score

2 records

0185US7385675B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Jun 10, 2008·18 cites·29 claims
0257US6730920B2Abbe arm calibration system for use in lithographic apparatusASML NETHERLANDS BV·Filed 2001·Granted May 4, 2004·10 cites·20 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →