Inventor · disambiguated record
Michio Yanagisawa
Also filed as: YANAGISAWA MICHIO
7 granted patents·7 pending applications·164 citations·filing 1989–2018
84Inventor score
Top patents by PatentIndex Score
14 records- 0189US6473159B1Anti-vibration system in exposure apparatusCANON KK·Filed 2000·Granted Oct 29, 2002·38 cites·24 claims
- 0284US5001453AHumidity sensorSEIKO EPSON CORP·Filed 1989·Granted Mar 19, 1991·53 cites·27 claims
- 0382US5062095AActuator and method of manufacturing thereofSEIKO EPSON CORP·Filed 1989·Granted Oct 29, 1991·45 cites·24 claims
- 0465US5027077AHumidity measuring apparatusSEIKO EPSON CORP·Filed 1989·Granted Jun 25, 1991·28 cites·20 claims
- 0546US8964290B2MicroscopeCANON KK·Filed 2012·Granted Feb 24, 2015·0 cites·4 claims
- 0645US10638021B2Measurement device, processing device, and article manufacturing methodCANON KK·Filed 2018·Granted Apr 28, 2020·0 cites·26 claims
- 0744US2005211515A1Anti-vibration mount apparatus, exposure apparatus, and device manufacturing methodCANON KK·Filed 2005·Application pending·0 cites
- 0844US2013314778A1MicroscopeCANON KK·Filed 2013·Application pending·0 cites
- 0941US8916840B2Lithography apparatus, and article manufacturing methodCANON KK·Filed 2013·Granted Dec 23, 2014·0 cites·8 claims
- 1041US2013083317A1Image acquisition apparatus, image acquisition method, and microscopeFUJII HIROFUMI·Filed 2012·Application pending·0 cites
- 1140US2013141562A1MicroscopeYANO MASASHI·Filed 2011·Application pending·0 cites
- 1236US2012314050A1Imaging apparatus and control method thereforNAWATA RYO·Filed 2012·Application pending·0 cites
- 1335US2016033753A1Image acquiring apparatusCANON KK·Filed 2015·Application pending·0 cites
- 1434US2005140961A1Anti-vibration system, method of controlling the same, exposure apparatus, and device manufacturing methodCANON KK·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →