Inventor · disambiguated record

Sebastian Doern

Also filed as: DOERN SEBASTIAN

1 granted patent·4 citations·filing 2010–2010

24Inventor score

Technology areasG03F

Files withENDRES MARTIN1

Top patents by PatentIndex Score

1 record

0177US8395754B2Illumination optical unit for EUV microlithographyENDRES MARTIN·Filed 2010·Granted Mar 12, 2013·4 cites·20 claims

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