Inventor · disambiguated record
Bjorn Hansson
Also filed as: HANSSON BJOERN · HANSSON BJOERN A M · HANSSON BJORN · HANSSON BJORN A M
19 granted patents·4 pending applications·278 citations·filing 1998–2023
94Inventor score
Top patents by PatentIndex Score
23 records- 0194US7598509B2Laser produced plasma EUV light sourceCYMER INC·Filed 2006·Granted Oct 6, 2009·41 cites·50 claims
- 0294US7109503B1Systems for protecting internal components of an EUV light source from plasma-generated debrisCYMER INC·Filed 2005·Granted Sep 19, 2006·25 cites·20 claims
- 0389US7365351B2Systems for protecting internal components of a EUV light source from plasma-generated debrisCYMER INC·Filed 2006·Granted Apr 29, 2008·14 cites·15 claims
- 0488US7476886B2Source material collection unit for a laser produced plasma EUV light sourceCYMER INC·Filed 2006·Granted Jan 13, 2009·24 cites·26 claims
- 0586US10971323B1Semiconductor X-ray targetEXCILLUM AB·Filed 2017·Granted Apr 6, 2021·5 cites·11 claims
- 0686US10818468B1Liquid target X-ray source with jet mixing toolEXCILLUM AB·Filed 2017·Granted Oct 27, 2020·5 cites·19 claims
- 0785US7453077B2EUV light sourceCYMER INC·Filed 2005·Granted Nov 18, 2008·20 cites·26 claims
- 0885US7239686B2Method and arrangement for producing radiationJETTEC AB·Filed 2003·Granted Jul 3, 2007·46 cites·20 claims
- 0983US6760406B2Method and apparatus for generating X-ray or EUV radiationJETTEC AB·Filed 2001·Granted Jul 6, 2004·38 cites·33 claims
- 1082US7732793B2Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light sourceCYMER INC·Filed 2007·Granted Jun 8, 2010·14 cites·7 claims
- 1171US6263004B1LaserSPECTRA PREC AB·Filed 1998·Granted Jul 17, 2001·46 cites·25 claims
- 1268US11979972B2X-ray source with an electromagnetic pumpEXCILLUM AB·Filed 2020·Granted May 7, 2024·0 cites·12 claims
- 1364US11963286B2X-ray source and method for generating X-ray radiationEXCILLUM AB·Filed 2022·Granted Apr 16, 2024·0 cites·20 claims
- 1464US11910515B2X-ray source with an electromagnetic pumpEXCILLUM AB·Filed 2020·Granted Feb 20, 2024·0 cites·15 claims
- 1562US11742171B2Method for imaging a sampleEXCILLUM AB·Filed 2020·Granted Aug 29, 2023·0 cites·15 claims
- 1662US2025277754A1Secondary emission compensation in x-ray sourcesEXCILLUM AB·Filed 2023·Application pending·0 cites
- 1756US11342154B2X-ray source and method for generating x-ray radiationEXCILLUM AB·Filed 2018·Granted May 24, 2022·0 cites·15 claims
- 1852US11651927B2Electron collector with oblique impact portionEXCILLUM AB·Filed 2019·Granted May 16, 2023·0 cites·15 claims
- 1951US11257651B2Determining width and height of electron spotEXCILLUM AB·Filed 2019·Granted Feb 22, 2022·0 cites·11 claims
- 2047US2025220799A1Determination of operational state of x-ray sourceEXCILLUM AB·Filed 2023·Application pending·0 cites
- 2146US2023238204A1X-ray imaging systemEXCILLUM AB·Filed 2021·Application pending·0 cites
- 2242US2010024980A1Laser produced plasma euv light sourceCYMER INC·Filed 2009·Application pending·0 cites
- 2341US9713239B2Laser produced plasma EUV light sourceHANSSON BJORN A M·Filed 2010·Granted Jul 18, 2017·0 cites·20 claims
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