Inventor · disambiguated record
Heebom Kim
Also filed as: KIM HEEBOM
5 granted patents·1 pending application·6 citations·filing 2006–2023
67Inventor score
Top patents by PatentIndex Score
6 records- 0172US10866507B2Pellicle and reticle including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2018·Granted Dec 15, 2020·1 cites·20 claims
- 0267US7629087B2Photomask, method of making a photomask and photolithography method and system using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2006·Granted Dec 8, 2009·4 cites·59 claims
- 0358US2024027890A1Reflective mask and method of designing anti-reflection pattern of the sameSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 0457US10224178B2Methods, systems and computer program products configured to adjust a critical dimension of reticle patterns used to fabricate semiconductor devicesJUNG YONGSEOK·Filed 2017·Granted Mar 5, 2019·1 cites·14 claims
- 0554US11409193B2Reticle in an apparatus for extreme ultraviolet exposureSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Aug 9, 2022·0 cites·20 claims
- 0651US11086210B2Photomask, method of fabricating the same, and method of manufacturing semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Aug 10, 2021·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →