Inventor · disambiguated record

Ekaterina Mikhailovna Viatkina

Also filed as: VIATKINA EKATERINA MIKHAILOVNA

3 granted patents·1 citations·filing 2017–2020

46Inventor score

Technology areasG03F

Files withASML NETHERLANDS BV3

Top patents by PatentIndex Score

3 records

0169US11048174B2Method of controlling a patterning process, lithographic apparatus, metrology apparatus lithographic cell and associated computer programASML NETHERLANDS BV·Filed 2017·Granted Jun 29, 2021·1 cites·21 claims
0249US12276919B2Method for controlling a semiconductor manufacturing processASML NETHERLANDS BV·Filed 2020·Granted Apr 15, 2025·0 cites·20 claims
0347US11709432B2Method to characterize post-processing data in terms of individual contributions from processing stationsASML NETHERLANDS BV·Filed 2019·Granted Jul 25, 2023·0 cites·20 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →