Inventor · disambiguated record
Koen Steffens
Also filed as: STEFFENS KOEN
34 granted patents·1 pending application·124 citations·filing 2007–2021
96Inventor score
Files withASML NETHERLANDS BV20DIRECKS DANIEL JOZEF MARIA2STAVENGA MARCO KOERT2STEFFENS KOEN2BERKVENS PAUL PETRUS JOANNES1
Top patents by PatentIndex Score
35 records- 0194US9823589B2Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2016·Granted Nov 21, 2017·5 cites·20 claims
- 0293US8351018B2Fluid handling structure, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2009·Granted Jan 8, 2013·22 cites·19 claims
- 0390US8634053B2Lithographic apparatus and device manufacturing methodRIEPEN MICHEL·Filed 2007·Granted Jan 21, 2014·12 cites·27 claims
- 0489US9785055B2Object holder and lithographic apparatusASML NETHERLANDS BV·Filed 2013·Granted Oct 10, 2017·7 cites·20 claims
- 0589US9298107B2Lithographic apparatus and methodLAURENT THIBAULT SIMON MATHIEU·Filed 2011·Granted Mar 29, 2016·6 cites·22 claims
- 0687US8421993B2Fluid handling structure, lithographic apparatus and device manufacturing methodDIRECKS DANIEL JOZEF MARIA·Filed 2009·Granted Apr 16, 2013·14 cites·20 claims
- 0787US7561250B2Lithographic apparatus having parts with a coated film adhered theretoASML NETHERLANDS BV·Filed 2007·Granted Jul 14, 2009·9 cites·36 claims
- 0886US9915877B2Object holder and lithographic apparatusASML NETHERLANDS BV·Filed 2017·Granted Mar 13, 2018·3 cites·20 claims
- 0986US8259283B2Immersion lithographic apparatus and device manufacturing methodDIRECKS DANIEL JOZEF MARIA·Filed 2009·Granted Sep 4, 2012·10 cites·24 claims
- 1085US9059228B2Substrate table, immersion lithographic apparatus and device manufacturing methodSTAVENGA MARCO KOERT·Filed 2010·Granted Jun 16, 2015·6 cites·22 claims
- 1183US8953142B2Lithographic apparatus, drying device, metrology apparatus and device manufacturing methodKEMPER NICOLAAS RUDOLF·Filed 2009·Granted Feb 10, 2015·6 cites·23 claims
- 1282US12072636B2Fluid handling system and lithographic apparatusASML NETHERLANDS BV·Filed 2020·Granted Aug 27, 2024·1 cites·20 claims
- 1381US8218126B2Lithographic apparatus and device manufacturing methodSTEFFENS KOEN·Filed 2008·Granted Jul 10, 2012·7 cites·32 claims
- 1478US8405817B2Lithographic apparatus, a method of controlling the apparatus and a device manufacturing methodSTAVENGA MARCO KOERT·Filed 2010·Granted Mar 26, 2013·4 cites·20 claims
- 1577US12197140B2Substrate table, immersion lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2021·Granted Jan 14, 2025·0 cites·20 claims
- 1676US8472003B2Fluid handling structure, lithographic apparatus and device manufacturing methodPATEL HRISHIKESH·Filed 2010·Granted Jun 25, 2013·5 cites·24 claims
- 1771US8755026B2Lithographic apparatus and a device manufacturing methodGOSEN JEROEN GERARD·Filed 2010·Granted Jun 17, 2014·2 cites·21 claims
- 1871US8416388B2Fluid handling device, an immersion lithographic apparatus and a device manufacturing methodEUMMELEN ERIK HENRICUS EGIDIUS CATHARINA·Filed 2010·Granted Apr 9, 2013·2 cites·20 claims
- 1968US8711326B2Fluid handling structure, a lithographic apparatus and a device manufacturing methodVAN DER HAM RONALD·Filed 2011·Granted Apr 29, 2014·2 cites·20 claims
- 2066US11215933B2Substrate table, immersion lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Jan 4, 2022·0 cites·19 claims
- 2165US10591828B2Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2019·Granted Mar 17, 2020·0 cites·20 claims
- 2263US10203611B2Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2017·Granted Feb 12, 2019·0 cites·20 claims
- 2361US10018925B2Lithographic apparatus, drying device, metrology apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Jul 10, 2018·0 cites·21 claims
- 2461US2018292762A1Lithographic apparatus, drying device, metrology apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Application pending·0 cites
- 2560US10481502B2Object holder and lithographic apparatusASML NETHERLANDS BV·Filed 2018·Granted Nov 19, 2019·0 cites·20 claims
- 2660US10268127B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Apr 23, 2019·0 cites·20 claims
- 2760US9606429B2Lithographic apparatus, drying device, metrology apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Mar 28, 2017·0 cites·20 claims
- 2859US10451980B2Substrate table, immersion lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Oct 22, 2019·0 cites·21 claims
- 2959US9645506B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted May 9, 2017·0 cites·20 claims
- 3055US9625833B2Substrate table, immersion lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Apr 18, 2017·0 cites·20 claims
- 3155US8681308B2Lithographic apparatus and device manufacturing methodBERKVENS PAUL PETRUS JOANNES·Filed 2007·Granted Mar 25, 2014·1 cites·22 claims
- 3251US9195147B2Lithographic apparatus and device manufacturing method involving a seal between a table and a componentSTEFFENS KOEN·Filed 2009·Granted Nov 24, 2015·0 cites·20 claims
- 3347US10001712B2Immersion lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Jun 19, 2018·0 cites·20 claims
- 3446US8508712B2Fluid handling structure, lithographic apparatus and device manufacturing methodVAN DEN DUNGEN CLEMENS JOHANNES GERARDUS·Filed 2009·Granted Aug 13, 2013·0 cites·18 claims
- 3539US10324384B2Lithographic apparatus and a method of manufacturing a lithographic apparatusASML NETHERLANDS BV·Filed 2015·Granted Jun 18, 2019·0 cites·20 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →