Assignee
STEFFENS KOEN
NL·2 granted patents·7 citations·filing 2008–2009
Technology mixG03F2
Top patents by PatentIndex Score
2 records- 0181US8218126B2Lithographic apparatus and device manufacturing methodSTEFFENS KOEN·Filed 2008·Granted Jul 10, 2012·7 cites·32 claims
- 0251US9195147B2Lithographic apparatus and device manufacturing method involving a seal between a table and a componentSTEFFENS KOEN·Filed 2009·Granted Nov 24, 2015·0 cites·20 claims
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