Inventor · disambiguated record
Michel Riepen
Also filed as: RIEPEN MICHEL
82 granted patents·5 pending applications·315 citations·filing 2005–2021
99Inventor score
Files withASML NETHERLANDS BV49RIEPEN MICHEL6STREEFKERK BOB6CORTIE ROGIER HENDRIKUS MAGDALENA4LEENDERS MARTINUS HENDRIKUS ANTONIUS3
Top patents by PatentIndex Score
87 records- 0198US7433016B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Oct 7, 2008·26 cites·21 claims
- 0297US9606449B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Mar 28, 2017·5 cites·20 claims
- 0396US8547523B2Fluid handling structure, lithographic apparatus and device manufacturing methodRIEPEN MICHEL·Filed 2010·Granted Oct 1, 2013·28 cites·20 claims
- 0496US7804577B2Lithographic apparatusASML NETHERLANDS BV·Filed 2006·Granted Sep 28, 2010·26 cites·44 claims
- 0596US7804575B2Lithographic apparatus and device manufacturing method having liquid evaporation controlASML NETHERLANDS BV·Filed 2005·Granted Sep 28, 2010·23 cites·44 claims
- 0695US10133190B2Fluid handling structure, a lithographic apparatus and a device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Nov 20, 2018·5 cites·20 claims
- 0794US11378893B2Lithographic apparatus and device manufacturing method involving a heaterASML NETHERLANDS BV·Filed 2020·Granted Jul 5, 2022·2 cites·20 claims
- 0894US8614784B2Fluid handling structure, lithographic apparatus and device manufacturing method, involving gas supplyRIEPEN MICHEL·Filed 2010·Granted Dec 24, 2013·14 cites·19 claims
- 0993US7468779B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Dec 23, 2008·12 cites·33 claims
- 1092US9442390B2Fluid handling structure including gas supply and gas recovery openings, a lithographic apparatus and a device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Sep 13, 2016·6 cites·20 claims
- 1192US9256136B2Fluid handling structure, lithographic apparatus and device manufacturing method involving gas supplyCORTIE ROGIER HENDRIKUS MAGDALENA·Filed 2011·Granted Feb 9, 2016·7 cites·21 claims
- 1292US9069262B2Fluid handling structure including gas supply and gas recovery openings, lithographic apparatus and device manufacturing methodCORTIE ROGIER HENDRIKUS MAGDALENA·Filed 2012·Granted Jun 30, 2015·7 cites·20 claims
- 1391US8421996B2Lithographic apparatusLEENDERS MARTINUS HENDRIKUS ANTONIUS·Filed 2010·Granted Apr 16, 2013·7 cites·20 claims
- 1491US8345218B2Immersion lithographic apparatus, drying device, immersion metrology apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2009·Granted Jan 1, 2013·14 cites·20 claims
- 1591US8144305B2Lithographic apparatus and device manufacturing methodLEENDERS MARTINUS HENDRIKUS ANTONIUS·Filed 2006·Granted Mar 27, 2012·14 cites·36 claims
- 1690US9846372B2Fluid handling structure, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Dec 19, 2017·3 cites·20 claims
- 1790US8634053B2Lithographic apparatus and device manufacturing methodRIEPEN MICHEL·Filed 2007·Granted Jan 21, 2014·12 cites·27 claims
- 1889US10684554B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Jun 16, 2020·1 cites·20 claims
- 1989US9188880B2Lithographic apparatus and device manufacturing method involving a heaterCADEE THEODORUS PETRUS MARIA·Filed 2011·Granted Nov 17, 2015·4 cites·32 claims
- 2089US8115903B2Lithographic apparatus and device manufacturing methodSTREEFKERK BOB·Filed 2008·Granted Feb 14, 2012·5 cites·20 claims
- 2188US9268242B2Lithographic apparatus and device manufacturing method involving a heater and a temperature sensorCADEE THEODORUS PETRUS MARIA·Filed 2010·Granted Feb 23, 2016·4 cites·38 claims
- 2288US8248577B2Lithographic apparatus and device manufacturing methodSTREEFKERK BOB·Filed 2005·Granted Aug 21, 2012·9 cites·28 claims
- 2387US7929112B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2008·Granted Apr 19, 2011·6 cites·16 claims
- 2486US10838310B2Lithographic apparatus and device manufacturing method involving a heaterASML NETHERLANDS BV·Filed 2019·Granted Nov 17, 2020·1 cites·20 claims
- 2585US9588437B2Fluid handling structure, a lithographic apparatus and a device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Mar 7, 2017·2 cites·20 claims
- 2685US7633073B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Dec 15, 2009·5 cites·30 claims
- 2783US10620544B2Fluid handling structure, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Apr 14, 2020·1 cites·20 claims
- 2883US9235138B2Fluid handling structure, a lithographic apparatus and a device manufacturing methodCORTIE ROGIER HENDRIKUS MAGDALENA·Filed 2012·Granted Jan 12, 2016·3 cites·16 claims
- 2983US8953142B2Lithographic apparatus, drying device, metrology apparatus and device manufacturing methodKEMPER NICOLAAS RUDOLF·Filed 2009·Granted Feb 10, 2015·6 cites·23 claims
- 3083US7928407B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Apr 19, 2011·4 cites·15 claims
- 3182US9140995B2Fluid handling structure, a lithographic apparatus and a device manufacturing methodRIEPEN MICHEL·Filed 2012·Granted Sep 22, 2015·3 cites·20 claims
- 3280US8902400B2Lithographic apparatus and a method of manufacturing a device using a lithographic apparatusLAFARRE RAYMOND WILHELMUS LOUIS·Filed 2011·Granted Dec 2, 2014·4 cites·15 claims
- 3378US8405817B2Lithographic apparatus, a method of controlling the apparatus and a device manufacturing methodSTAVENGA MARCO KOERT·Filed 2010·Granted Mar 26, 2013·4 cites·20 claims
- 3478US7903232B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Mar 8, 2011·8 cites·31 claims
- 3577US9213246B2Fluid extraction system, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Dec 15, 2015·2 cites·20 claims
- 3676US11016394B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2020·Granted May 25, 2021·0 cites·21 claims
- 3776US9411238B2Source-collector device, lithographic apparatus, and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted Aug 9, 2016·4 cites·8 claims
- 3876US9176393B2Lithographic apparatus and a method of operating the apparatusCLOIN CHRISTIAN GERARDUS NORBERTUS HENDRICUS MARIE·Filed 2009·Granted Nov 3, 2015·5 cites·20 claims
- 3976US8138486B2Lithographic apparatus and device manufacturing methodJANSEN HANS·Filed 2009·Granted Mar 20, 2012·2 cites·20 claims
- 4074US12072635B2Lithographic apparatus and a method of operating the apparatusASML NETHERLANDS BV·Filed 2021·Granted Aug 27, 2024·0 cites·19 claims
- 4174US8654309B2Fluid extraction system, lithographic apparatus and device manufacturing methodKEMPER NICOLAAS RUDOLF·Filed 2009·Granted Feb 18, 2014·3 cites·20 claims
- 4273US10353296B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Jul 16, 2019·0 cites·20 claims
- 4372US9477153B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Oct 25, 2016·1 cites·20 claims
- 4471US11187991B2Lithographic apparatus and a method of operating the apparatusASML NETHERLANDS BV·Filed 2015·Granted Nov 30, 2021·1 cites·20 claims
- 4571US8274641B2Substrate table, lithographic apparatus and device manufacturing methodMONDT EVA·Filed 2009·Granted Sep 25, 2012·3 cites·20 claims
- 4670US10025196B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Jul 17, 2018·0 cites·22 claims
- 4770US8860924B2Lithographic apparatus and device manufacturing methodSTREEFKERK BOB·Filed 2012·Granted Oct 14, 2014·1 cites·20 claims
- 4870US8023101B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2007·Granted Sep 20, 2011·2 cites·46 claims
- 4969US8149379B2Lithographic apparatus and device manufacturing methodDONDERS SJOERD NICOLAAS LAMBERTUS·Filed 2008·Granted Apr 3, 2012·2 cites·19 claims
- 5068US8711326B2Fluid handling structure, a lithographic apparatus and a device manufacturing methodVAN DER HAM RONALD·Filed 2011·Granted Apr 29, 2014·2 cites·20 claims
Showing the top 50 of 87 patent records by PatentIndex Score.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →