Assignee
RIEPEN MICHEL
NL·6 granted patents·57 citations·filing 2007–2012
Top patents by PatentIndex Score
6 records- 0196US8547523B2Fluid handling structure, lithographic apparatus and device manufacturing methodRIEPEN MICHEL·Filed 2010·Granted Oct 1, 2013·28 cites·20 claims
- 0294US8614784B2Fluid handling structure, lithographic apparatus and device manufacturing method, involving gas supplyRIEPEN MICHEL·Filed 2010·Granted Dec 24, 2013·14 cites·19 claims
- 0390US8634053B2Lithographic apparatus and device manufacturing methodRIEPEN MICHEL·Filed 2007·Granted Jan 21, 2014·12 cites·27 claims
- 0482US9140995B2Fluid handling structure, a lithographic apparatus and a device manufacturing methodRIEPEN MICHEL·Filed 2012·Granted Sep 22, 2015·3 cites·20 claims
- 0547US8804094B2Lithographic apparatus and a device manufacturing methodRIEPEN MICHEL·Filed 2011·Granted Aug 12, 2014·0 cites·22 claims
- 0644US9625828B2Fluid handling structure, lithographic apparatus and device manufacturing methodRIEPEN MICHEL·Filed 2011·Granted Apr 18, 2017·0 cites·20 claims
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