Inventor · disambiguated record
Xiangzhao Wang
Also filed as: WANG XIANGZHAO
13 granted patents·17 citations·filing 2006–2022
85Inventor score
Top patents by PatentIndex Score
13 records- 0190US11604418B2Multi-channel device and method for measuring distortion and magnification of objective lensSHANGHAI INST OPTICS & FINE MECH CAS·Filed 2021·Granted Mar 14, 2023·2 cites·9 claims
- 0283US11009336B2Method for wavefront measurement of optical imaging system based on grating shearing interferometrySHANGHAI INST OPTICS & FINE MECH CAS·Filed 2019·Granted May 18, 2021·3 cites·2 claims
- 0383US9658114B1Device for measuring point diffraction interferometric wavefront aberration and method for detecting wave aberrationSHANGHAI INST OPTICS & FINE MECH CAS·Filed 2015·Granted May 23, 2017·5 cites·19 claims
- 0479US11215512B2Light intensity fluctuation-insensitive projection objective wave aberration detection device and detection method thereofSHANGHAI INST OPTICS & FINE MECH CAS·Filed 2020·Granted Jan 4, 2022·1 cites·7 claims
- 0579US11029611B2Device and method for detecting projection objective wave-front aberrationSHANGHAI INST OPTICS & FINE MECH CAS·Filed 2019·Granted Jun 8, 2021·2 cites·8 claims
- 0676US9766154B2Multi field point aberration parallel metrology device and method for lithographic projection lensSHANGHAI INST OPTICS & FINE MECH CAS·Filed 2015·Granted Sep 19, 2017·3 cites·4 claims
- 0772US10969274B2Method for detecting wavefront aberration for optical imaging system based on grating shearing interferometerSHANGHAI INST OPTICS & FINE MECH CAS·Filed 2019·Granted Apr 6, 2021·1 cites·3 claims
- 0855US11788829B2Simultaneous phase-shift point diffraction interferometer and method for detecting wave aberrationSHANGHAI INST OPTICS & FINE MECH CAS·Filed 2022·Granted Oct 17, 2023·0 cites·8 claims
- 0952US11561082B2Method for compensation during the process of wavefront reconstruction in grating-based lateral shearing interferometrySHANGHAI INST OPTICS & FINE MECH CAS·Filed 2021·Granted Jan 24, 2023·0 cites·6 claims
- 1050US11340118B2Method for high-accuracy wavefront measurement base on grating shearing interferometrySHANGHAI INST OPTICS & FINE MECH CAS·Filed 2021·Granted May 24, 2022·0 cites·3 claims
- 1148US11668625B2Apparatus and method for detecting wavefront aberration of objective lensSHANGHAI INST OPTICS & FINE MECH CAS·Filed 2021·Granted Jun 6, 2023·0 cites·3 claims
- 1238US8035801B2Method for in-situ aberration measurement of optical imaging system in lithographic toolsSHANGHAI MICROELECTRONICS EQUI·Filed 2006·Granted Oct 11, 2011·0 cites·14 claims
- 1333US9863841B2Measuring device having ideal wavefront generator for detecting point diffraction interferometric wavefront aberration of measured optical system and method for detecting wavefront aberration thereofSHANGHAI INST OPTICS & FINE MECH CAS·Filed 2015·Granted Jan 9, 2018·0 cites·20 claims
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