Inventor · disambiguated record
Thomas Elster
Also filed as: ELSTER THOMAS
6 granted patents·43 citations·filing 1999–2009
79Inventor score
Top patents by PatentIndex Score
6 records- 0183US8148702B2Arrangement for the illumination of a substrate with a plurality of individually shaped particle beams for high-resolution lithography of structure patternsDOERING HANS-JOACHIM·Filed 2009·Granted Apr 3, 2012·16 cites·22 claims
- 0275US7560713B2Correction lens system for a particle beam projection deviceVISTEC ELECTRON BEAM GMBH·Filed 2005·Granted Jul 14, 2009·5 cites·7 claims
- 0366US7601969B2Illumination condenser for a particle optical projection systemVISTEC ELECTRON BEAM GMBH·Filed 2005·Granted Oct 13, 2009·2 cites·12 claims
- 0460US6600162B1Method and device for exposing a substrate to lightLEICA MICROSYS LITHOGRAPHY LTD·Filed 1999·Granted Jul 29, 2003·18 cites·15 claims
- 0548US6541776B1Device for electrostatic deflection of a particle beamLEICA MICROSYS LITHOGRAPHY LTD·Filed 2000·Granted Apr 1, 2003·2 cites·12 claims
- 0642US7491946B2Electrostatic deflection system for corpuscular radiationLEICA MICROSYS LITHOGRAPHY LTD·Filed 2006·Granted Feb 17, 2009·0 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →