Inventor · disambiguated record
Satbir Kahlon
Also filed as: KAHLON SATBIR
6 granted patents·9 pending applications·7 citations·filing 2011–2016
72Inventor score
Top patents by PatentIndex Score
15 records- 0173US8893923B2Methods and systems for dispensing different liquids for high productivity combinatorial processingINTERMOLECULAR INC·Filed 2012·Granted Nov 25, 2014·3 cites·19 claims
- 0269US8663397B1Processing and cleaning substratesINTERMOLECULAR INC·Filed 2012·Granted Mar 4, 2014·2 cites·6 claims
- 0359US9016289B2System and method for reducing particles and marks on wafer surface following reactor processingKAHLON SATBIR·Filed 2011·Granted Apr 28, 2015·2 cites·17 claims
- 0449US2014174481A1Processing and Cleaning SubstratesINTERMOLECULAR INC·Filed 2014·Application pending·0 cites
- 0549US2014102488A1Method and System for Improving Performance and Preventing Corrosion in Multi-Module Cleaning ChamberINTERMOLECULAR INC·Filed 2013·Application pending·0 cites
- 0645US9076674B2Method and apparatus for improving particle performanceINTERMOLECULAR INC·Filed 2012·Granted Jul 7, 2015·0 cites·20 claims
- 0743US2016118309A1Minimal Contact Wet Processing Systems and MethodsINTERMOLECULAR INC·Filed 2014·Application pending·0 cites
- 0842US8647446B2Method and system for improving performance and preventing corrosion in multi-module cleaning chamberKAHLON SATBIR·Filed 2011·Granted Feb 11, 2014·0 cites·8 claims
- 0942US2016111302A1Systems and Methods for Wet Processing Substrates with Rotating Splash ShieldINTERMOLECULAR INC·Filed 2014·Application pending·0 cites
- 1038US9223319B2High dilution ratio by successively preparing and diluting chemicalsINTERMOLECULAR INC·Filed 2012·Granted Dec 29, 2015·0 cites·10 claims
- 1138US2014174656A1Method to Improve the Operational Robustness and Safety of Combinatorial Processing SystemsINTERMOLECULAR INC·Filed 2012·Application pending·0 cites
- 1238US2014144471A1Contamination Control, Rinsing, and Purging Methods to Extend the Life of Components within Combinatorial Processing SystemsINTERMOLLECULAR INC·Filed 2012·Application pending·0 cites
- 1336US2017104031A1Selector ElementsINTERMOLECULAR INC·Filed 2016·Application pending·0 cites
- 1435US2013156530A1Method and apparatus for reducing contamination of substrateSCULAC ROBERT·Filed 2011·Application pending·0 cites
- 1532US2013133701A1Method and apparatus for dispensing an inert gasKAHLON SATBIR·Filed 2011·Application pending·0 cites
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