Inventor · disambiguated record
Yen-Cheng Lu
Also filed as: LU YEN-CHENG
77 granted patents·12 pending applications·1,207 citations·filing 2007–2025
99Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD36ARTILUX INC22TAIWAN SEMICONDUCTOR MFG20UNIV NAT TAIWAN4LU YEN-CHENG3
Top patents by PatentIndex Score
89 records- 0199US11777049B2Photo-detecting apparatus with low dark currentARTILUX INC·Filed 2020·Granted Oct 3, 2023·6 cites·14 claims
- 0299US11652184B2Photo-detecting apparatus with low dark currentARTILUX INC·Filed 2020·Granted May 16, 2023·7 cites·18 claims
- 0399US9618837B2Extreme ultraviolet lithography process and mask with reduced shadow effect and enhanced intensityTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Apr 11, 2017·129 cites·20 claims
- 0498US11255724B2Photodetecting device for detecting different wavelengthsARTILUX INC·Filed 2020·Granted Feb 22, 2022·5 cites·18 claims
- 0598US11105928B2Light-sensing apparatus and light-sensing method thereofARTILUX INC·Filed 2020·Granted Aug 31, 2021·17 cites·20 claims
- 0698US8841047B2Extreme ultraviolet lithography process and maskYU SHINN-SHENG·Filed 2012·Granted Sep 23, 2014·326 cites·20 claims
- 0798US8828625B2Extreme ultraviolet lithography mask and multilayer deposition method for fabricating sameLU YEN-CHENG·Filed 2012·Granted Sep 9, 2014·301 cites·20 claims
- 0898US8785084B2Method for mask fabrication and repairLU YEN-CHENG·Filed 2012·Granted Jul 22, 2014·84 cites·20 claims
- 0998US8628897B1Extreme ultraviolet lithography process and maskLU YEN-CHENG·Filed 2012·Granted Jan 14, 2014·97 cites·20 claims
- 1097US12013463B2Light-sensing apparatus and light-sensing method thereofARTILUX INC·Filed 2023·Granted Jun 18, 2024·3 cites·18 claims
- 1197US9625824B2Extreme ultraviolet lithography collector contamination reductionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Apr 18, 2017·30 cites·20 claims
- 1297US8791024B1Method to define multiple layer patterns using a single exposureTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Jul 29, 2014·31 cites·27 claims
- 1396US11630212B2Light-sensing apparatus and light-sensing method thereofARTILUX INC·Filed 2021·Granted Apr 18, 2023·3 cites·20 claims
- 1496US9488905B2Extreme ultraviolet lithography process and mask with reduced shadow effect and enhanced intensityTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Nov 8, 2016·6 cites·20 claims
- 1595US9678431B2EUV lithography system and method with optimized throughput and stabilityTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Jun 13, 2017·6 cites·20 claims
- 1694US9075313B2Multiple exposures in extreme ultraviolet lithographyTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Jul 7, 2015·9 cites·20 claims
- 1794US8765330B2Phase shift mask for extreme ultraviolet lithography and method of fabricating sameSHIH CHIA-TSUNG·Filed 2012·Granted Jul 1, 2014·85 cites·20 claims
- 1893US12278252B2Photo-detecting apparatus with low dark currentARTILUX INC·Filed 2021·Granted Apr 15, 2025·2 cites·15 claims
- 1990US12256578B2Optical sensing apparatusARTILUX INC·Filed 2024·Granted Mar 18, 2025·2 cites·19 claims
- 2090US9261774B2Extreme ultraviolet lithography process and mask with reduced shadow effect and enhanced intensityTAIWAN SEMICONDUCTOR MFG·Filed 2014·Granted Feb 16, 2016·4 cites·20 claims
- 2190US9081312B2Method to define multiple layer patterns with a single exposure by E-beam lithographyTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Jul 14, 2015·7 cites·22 claims
- 2287US10162257B2Extreme ultraviolet lithography system, device, and method for printing low pattern density featuresTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Dec 25, 2018·2 cites·20 claims
- 2386US9964850B2Method to mitigate defect printability for ID patternTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted May 8, 2018·3 cites·20 claims
- 2486US9535334B2Extreme ultraviolet lithography process to print low pattern density featuresTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Jan 3, 2017·4 cites·19 claims
- 2584US11448830B2Photo-detecting apparatus with multi-reset mechanismARTILUX INC·Filed 2019·Granted Sep 20, 2022·3 cites·17 claims
- 2684US9690186B2Extreme ultraviolet lithography process and maskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Jun 27, 2017·2 cites·20 claims
- 2784US9588419B2Extreme ultraviolet light (EUV) photomasks and fabrication methods thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Mar 7, 2017·2 cites·20 claims
- 2883US9442384B2Extreme ultraviolet lithography process and maskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Sep 13, 2016·3 cites·20 claims
- 2982US12282369B1Power-off protection method and apparatus, device, and storage mediumSUZHOU METABRAIN INTELLIGENT TECHNOLOGY CO LTD·Filed 2023·Granted Apr 22, 2025·1 cites·20 claims
- 3082US12196610B2Photodetecting device for detecting different wavelengthsARTILUX INC·Filed 2023·Granted Jan 14, 2025·0 cites·20 claims
- 3180US9377696B2Extreme ultraviolet lithography process and maskTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Jun 28, 2016·2 cites·19 claims
- 3280US9229326B2Method for integrated circuit patterningTAIWAN SEMICONDUCTOR MFG·Filed 2014·Granted Jan 5, 2016·4 cites·20 claims
- 3380US9034569B2Extreme ultraviolet lithography process and maskTAIWAN SEMICONDUCTOR MFG·Filed 2014·Granted May 19, 2015·2 cites·20 claims
- 3479US9442387B2Extreme ultraviolet lithography processTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Sep 13, 2016·2 cites·20 claims
- 3579US9223197B2Lithography and mask for resolution enhancementTAIWAN SEMICONDUCTOR MFG·Filed 2014·Granted Dec 29, 2015·2 cites·20 claims
- 3679US9122166B2Extreme ultraviolet lithography process and maskTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Sep 1, 2015·2 cites·20 claims
- 3779US2025347556A1Photonic computingARTILUX INC·Filed 2025·Application pending·0 cites
- 3878US2023275177A1Photo-detecting apparatus with low dark currentARTILUX INC·Filed 2023·Application pending·0 cites
- 3977US9733562B2Extreme ultraviolet lithography process and maskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Aug 15, 2017·1 cites·20 claims
- 4077US9417534B2Lithography method and structure for resolution enhancement with a two-state maskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Aug 16, 2016·2 cites·21 claims
- 4177US2025347555A1Photonic computingARTILUX INC·Filed 2025·Application pending·0 cites
- 4276US11686614B2Photodetecting device for detecting different wavelengthsARTILUX INC·Filed 2021·Granted Jun 27, 2023·0 cites·17 claims
- 4375US9146459B2Extreme ultraviolet lithography process and maskTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Sep 29, 2015·1 cites·20 claims
- 4473US11086227B2Method to mitigate defect printability for ID patternTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Aug 10, 2021·0 cites·20 claims
- 4573US10976655B2Extreme ultraviolet lithography system, device, and method for printing low pattern density featuresTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Apr 13, 2021·0 cites·20 claims
- 4673US9182659B2Extreme ultraviolet lithography process and maskTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Nov 10, 2015·1 cites·20 claims
- 4772US11574942B2Semiconductor device with low dark noiseARTILUX INC·Filed 2019·Granted Feb 7, 2023·1 cites·7 claims
- 4871US9405195B2Method to define multiple layer patterns with a single exposure by charged particle beam lithographyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Aug 2, 2016·1 cites·20 claims
- 4970US9304390B2Extreme ultraviolet lithography process and maskTAIWAN SEMICONDUCTOR MFG·Filed 2014·Granted Apr 5, 2016·1 cites·20 claims
- 5070US9081288B2Extreme ultraviolet (EUV) mask, method of fabricating the EUV mask and method of inspecting the EUV maskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Jul 14, 2015·1 cites·20 claims
Showing the top 50 of 89 patent records by PatentIndex Score.
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