Assignee
LU YEN-CHENG
TW·3 granted patents·482 citations·filing 2012–2012
Technology mixG03F3
Top patents by PatentIndex Score
3 records- 0198US8828625B2Extreme ultraviolet lithography mask and multilayer deposition method for fabricating sameLU YEN-CHENG·Filed 2012·Granted Sep 9, 2014·301 cites·20 claims
- 0298US8785084B2Method for mask fabrication and repairLU YEN-CHENG·Filed 2012·Granted Jul 22, 2014·84 cites·20 claims
- 0398US8628897B1Extreme ultraviolet lithography process and maskLU YEN-CHENG·Filed 2012·Granted Jan 14, 2014·97 cites·20 claims
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